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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >The effect of mixed electric field on characteristic of Ar-N-2 plasma jets for TiN surface treatment
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The effect of mixed electric field on characteristic of Ar-N-2 plasma jets for TiN surface treatment

机译：混合电场对锡表面处理Ar-N-2等离子体喷射特性的影响

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摘要

In this paper, we present a new structure for Ar-N-2 plasma jet generation where a pulsed electric field is modified with a second alternating electric field, referred to as mixed electric field. The electric field distribution through the jet tube is simulated for the conventional and newly designed plasma jet. It is demonstrated that the value of the electric field becomes stronger due to mixed electric field, particularly between the tip and ring electrodes through the tube. Not only does the length of plasma jet increase from 15 cm to 30 cm when a mixed electric field is employed, but also the temperature of the substrate surface decreases from 62 degrees C to 52 degrees C at the same power, which is favorable for industrial applications. It is shown that introducing more nitrogen into the plasma jet shortens the length of the jet, while the jet length could substantially be improved using the current design. The capability of surface treatment at different electrical power is also evaluated on deposited TiN layers by the conventional and current plasma jet. The surface treatment by the newly designed plasma jet based on mixed electric field shows no detectable damage on the TiN layer, while the conventional plasma jet degrades the surface at equal power. The hydrophilicity of the surface is also measured by the contact angle of a water droplet, which decreases from 66 to 31 degrees after surface treatment, implying the surface becomes more hydrophilic. The temperature distribution on the substrate is also evaluated for Ar-N-2 plasma jet and compared with the conventional plasma jet structure.
机译：在本文中，我们为AR-N-2等离子体射流产生了一种新的结构，其中脉冲电场用第二交替电场修改，称为混合电场。通过喷射管的电场分布用于传统的和新设计的等离子体射流。结果证明，由于混合电场，电场的值变得更强，特别是在尖端和环电极通过管之间。当采用混合电场时，等离子体射流的长度不仅增加15厘米至30厘米，而且在相同的电力下，基板表面的温度也从62摄氏度降低到52℃，这是有利的应用程序。结果表明，在等离子体射流中引入更多的氮气缩短了射流的长度，而射流长度可以基本上使用电流设计改进。在常规和电流等离子体射流上还在沉积的TiN层上评估了不同电力下表面处理的能力。基于混合电场的新设计等离子体射流的表面处理显示在锡层上没有可检测到的损坏，而传统的等离子体射流以相等的功率降低表面。表面的亲水性也通过水滴的接触角来测量，该水滴在表面处理后从66到31度降低，暗示表面变得更加亲水。还评估基板上的温度分布，并与常规等离子体射流结构进行比较。

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