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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Experimental analysis of time-phase-shift flow sensing based on a piezoelectric peristaltic micropump
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Experimental analysis of time-phase-shift flow sensing based on a piezoelectric peristaltic micropump

机译：基于压电蠕动微泵的时移流动传感试验分析

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摘要

Flow rate sensing is a critical issue for piezoelectric-based micropump systems. This paper describes experimental analysis of flow rate sensing in a peristaltic micropump system. Sensing can be integrated with such a pump using piezoelectric actuators based on the time-phase-shift (TPS) method. To do this, an evaluation-window is added on the falling edge of the driving pulse to help detect the flow velocity without affecting the flow rate. We fabricate a prototype piezoelectric peristaltic micropump with three chambers and three piezoelectric actuators. The middle actuator works not only as an actuator for driving fluid but also as a transducer for sensing flow rate. An evaluation-window is performed to ascertain the relationship between the flow rate and the phase shift of output-signal responses from the transducer. The experimental results show that the evaluation-window response of flow rates in a piezoelectric peristaltic micropump has rates of from 5.56. 33.36 mu l s(-1). The results are extended to propose a practical flow rate sensor, the design of which can be realized easily in the piezoelectric peristaltic micropump system for sensorless responses that can detect flow rate without any sensors or circuits. The proposed TPS method is real-time, integrated, fast, efficient, and suitable for flow rate detection in piezoelectric peristaltic micropumps.
机译：流量传感是压电基微泵系统的关键问题。本文介绍了蠕动微泵系统中流速感测的实验分析。通过基于时移（TPS）方法，使用压电致动器可以与这种泵集成在这种泵中。为此，在驱动脉冲的下降沿添加评估窗口，以帮助检测流速而不会影响流速。我们用三个室和三个压电执行器制造原型压电蠕动微泵。中间执行器不仅适用于用于驱动流体的致动器，而且是用于传感流量的换能器。执行评估窗口以确定来自换能器的输出信号响应的流速与输出信号响应的相移之间的关系。实验结果表明，压电蠕动微泵中流速的评价窗口响应具有5.56的速率。 33.36 mu l s（-1）。结果延伸以提出实用的流量传感器，其设计可以在压电蠕动微泵系统中容易地实现，以用于无传感器响应，可以检测没有任何传感器或电路的流速。所提出的TPS方法是实时，集成，快速，高效，适用于压电蠕动微泵中的流量检测。

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