• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>RSC Advances >Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer deposition
【24h】

Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer deposition

机译：原子层沉积沉积无定形LiAlo2薄膜的电学特性

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

LiAlO2 thin films deposited by atomic layer deposition (ALD) have a potential application as an electrolyte in three-dimensional (3D) all-solid-state microbatteries. In this study, Li-ion conductivity of such films is investigated by both in-plane and cross-plane methods. LiAlO2 thin films with a Li composition of [Li]/([Li] + [Al]) = 0.46 and an amorphous structure were grown by ALD with thicknesses of 90, 160 and 235 nm on different substrates. The electrical characterization was conducted by impedance spectroscopy using inert electrodes over a temperature range of 25-200 degrees C in an inert atmosphere. In-plane conductivities were obtained from films on insulating sapphire substrates, whereas cross-plane conductivities were measured from films on conducting titanium substrates. For the first time, comparison of the in-plane and cross-plane conductivities in these ALD LiAlO2 films has been achieved. More comparable results are obtained using a cross-plane method, whereas in-plane conductivity measurements demonstrate a considerable thickness-dependence with thinner film thickness. The room-temperature conductivity of the LiAlO2 films has been determined to be in the order of 10(-10) S cm(-1) with an activation energy of ca. 0.8 eV.
机译：由原子层沉积（ALD）沉积的LiAlO2薄膜具有作为三维（3D）全固态微滴式经济型微滴乳的电解质的潜在应用。在该研究中，通过面内和平面方法研究这种薄膜的锂离子电导率。 LiAlo2薄膜用[Li] /（[Li] + [Al]）= 0.46和无定形结构，在不同底物上呈厚度为90,160和235nm的ALD生长。在惰性气氛中，在25-200℃的温度范围内的惰性电极进行电气表征。从绝缘蓝宝石基板上的薄膜获得面内导电，而在导电钛基材上的薄膜测量平面导电。首次，已经实现了这些ALD LiAlo2膜中的平面内和面平面导电的比较。使用跨平面方法获得更可比的结果，而面内电导率测量表现出相当大的厚度依赖性，厚度较薄。已经确定了LiAlo2薄膜的室温导电性，其达到10（10）厘米（-1）的顺序，具有CA的活化能。 0.8 ev。

著录项

  • 来源
    《RSC Advances》 |2016年第65期|共8页
  • 作者

    Hu Yang; Ruud Amund; Miikkulainen Ville; Norby Truls; Nilsen Ola; Fjellvag Helmer;

  • 作者单位

    Univ Oslo Dept Chem Ctr Mat Sci &

    Nanotechnol POB 1126 NO-0318 Oslo Norway;

    Univ Oslo Dept Chem Ctr Mat Sci &

    Nanotechnol POB 1126 NO-0318 Oslo Norway;

    Univ Helsinki Lab Inorgan Chem POB 55 FI-00014 Helsinki Finland;

    Univ Oslo Dept Chem Ctr Mat Sci &

    Nanotechnol POB 1126 NO-0318 Oslo Norway;

    Univ Oslo Dept Chem Ctr Mat Sci &

    Nanotechnol POB 1126 NO-0318 Oslo Norway;

    Univ Oslo Dept Chem Ctr Mat Sci &

    Nanotechnol POB 1126 NO-0318 Oslo Norway;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号