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Synthesis, characterization of silicon(IV) compounds containing 2-alkyl-aminopyridine ligands and evaluation of them as CVD precursors

机译:合成,表征含有2-烷基 - 氨基吡啶配体的硅(IV)化合物,并作为CVD前体的评价

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摘要

A family of silicon(IV) compounds, where the Si centers of trimethylsilyl (-SiMe3) are linked with 2-alkyl-aminopyridine ligands, has been synthesized by reaction of the corresponding lithium salt of these ligands and SiMe3Cl in a general procedure. They were characterized by H-1 NMR, C-13 NMR, Si-29 NMR, EI-MS and elemental analysis where necessary. Thereinto, Si-29 NMR and the synthesis of 2-N,N-bis(trimethylsilyl)aminopyridine were achieved for the confirmation of their coordination structures. Significantly, the evaluation of these silicon compounds containing 2-aminopyridinates as CVD precursors was discussed for the first time. Thermal stability, transport behavior and vapour pressures were assessed by simultaneous thermal analyses (STA). Chemical vapor deposition was accomplished in a hot wall CVD reactor system to qualitatively demonstrate the ability of them as CVD precursors.
机译:一系列硅(IV)化合物,其中三甲基甲硅烷基(-SIME3)的Si中心与2-烷基 - 氨基吡啶配体连接,通过将这些配体和SIME3Cl的相应相应的锂盐的反应在一般程序中合成。 它们的特征在于H-1 NMR,C-13 NMR,Si-29 NMR,EI-MS和必要时分析。 其中,Si-29 NMR和2-N,N-BIS(三甲基甲硅烷基)氨基吡啶的合成进行了确认的配位结构。 值得注意的是,首次讨论了含有2-氨基吡啶物作为CVD前体的这些硅化合物的评价。 通过同时热分析(STA)评估热稳定性,运输行为和蒸汽压力。 在热壁CVD反应器系统中完成化学气相沉积,以定性证明它们作为CVD前体的能力。

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  • 来源
    《RSC Advances》 |2015年第74期|共6页
  • 作者单位

    Jiangnan Univ Sch Chem &

    Mat Engn Minist Educ Key Lab Food Colloids &

    Biotechnol Wuxi 214122 Jiangsu Peoples R China;

    Jiangnan Univ Sch Chem &

    Mat Engn Minist Educ Key Lab Food Colloids &

    Biotechnol Wuxi 214122 Jiangsu Peoples R China;

    Jiangnan Univ Sch Chem &

    Mat Engn Minist Educ Key Lab Food Colloids &

    Biotechnol Wuxi 214122 Jiangsu Peoples R China;

    Jiangnan Univ Sch Chem &

    Mat Engn Minist Educ Key Lab Food Colloids &

    Biotechnol Wuxi 214122 Jiangsu Peoples R China;

    Jiangnan Univ Sch Chem &

    Mat Engn Minist Educ Key Lab Food Colloids &

    Biotechnol Wuxi 214122 Jiangsu Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

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