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首页> 外文期刊>Bulletin of the Chemical Society of Japan >Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method
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Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method

机译：使用印刷和压印方法，适用于Au超材料的反向色调光刻的UV可固化树脂的研制

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摘要

We developed a UV-curable resin (NL-SU1) suitable for screen printing with laser-drilled polyimide masks and reverse-tone nanoimprint lithography. The viscosity of the UV-curable resin composed of two bisphenol A-based monomers was adjusted to 11.0 Pa.s for the screen printing process. It was determined by photo-differential scanning calorimetry that photoinitiator Irgacure 369 was suitable for high methacrylate consumption in UV curing. The UV-curable resin after curing could be used as a top-coated resist layer on another imprinted resist layer because of its sufficient contrast in oxygen reactive ion etching and argon ion milling. We demonstrated a method for reverse-tone lithography in a print-and-imprint method to fabricate 20-nm-thick and 50-nm-linewide Au split-ring resonator arrays.
机译：我们开发了一种适用于激光钻的聚酰亚胺掩模和反向纳米压印光刻的紫外线固化树脂（NL-SU1）。 将由两种双酚A基单体组成的UV固化树脂的粘度调节至11.0Pa。用于丝网印刷过程。 通过光差分扫描量热法测定光引发剂Irgacure 369适用于UV固化中的高甲基丙烯酸酯消耗。 固化后的UV可固化树脂可在另一个压印的抗蚀剂层上用作顶涂层的抗蚀剂层，因为其在氧反应离子蚀刻和氩离子铣削中足够对比。 我们证明了一种用于在印刷和压印方法中进行反向色调光刻的方法，以制造20nm厚的50nm-linewide au分型环谐振器阵列。

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    Uehara Takuya; Sato Shinya; Ito Shunya; Yano Haruna; Nakamura Takahiro; Nakagawa Masaru;

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    Tohoku Univ IMRAM Aoba Ku 2-1-1 Katahira Sendai Miyagi 9808577 Japan;

    Tohoku Univ IMRAM Aoba Ku 2-1-1 Katahira Sendai Miyagi 9808577 Japan;

    Tohoku Univ IMRAM Aoba Ku 2-1-1 Katahira Sendai Miyagi 9808577 Japan;

    Tohoku Univ IMRAM Aoba Ku 2-1-1 Katahira Sendai Miyagi 9808577 Japan;

    Tohoku Univ IMRAM Aoba Ku 2-1-1 Katahira Sendai Miyagi 9808577 Japan;

    Tohoku Univ IMRAM Aoba Ku 2-1-1 Katahira Sendai Miyagi 9808577 Japan;

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