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首页> 外文期刊>Contributions to Plasma Physics >Particle‐in‐cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe
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Particle‐in‐cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe

机译：电子和离子电流的粒子内/蒙特卡罗模拟圆柱形Langmuir探针

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摘要

>Electron and ion currents to a cylindrical Langmuir (electrostatic) probe were calculated using the particle‐in‐cell/Monte Carlo (PIC/MC) self‐consistent simulation for a neutral gas in the pressure range 2–3,000?Pa. The simulation enables us to calculate the probe currents even at high neutral gas pressures when the collisions of collected charged particles with neutral gas particles near the probe are important. The main aim of this paper is the calculation of probe currents at such high gas pressures and the comparison of the results with experimentally measured probe currents. Simulations were performed for two cases: (a) probes with varying radii in a non‐thermal plasma with high electron temperature at low neutral gas pressure of 2?Pa (in order to verify the correctness of our simulations), and (b) probe with the radius of 10?μm in the afterglow plasma with low electron temperature and a higher neutral gas pressure (up to 3,000?Pa). The electron probe currents obtained in case (a) show good agreement with those predicted by the orbital motion limited current (OMLC) theory for probes with radii up to 100?μm for the given plasma conditions. At larger probe radii and/or at higher probe voltages, the OMLC theory incorrectly predicts too high an electron probe current for the plasma parameters studied. Additionally, a formula describing the spatial dependence of the electron density in the presheath in the collisionless case is derived. The simulation at higher neutral gas pressures, i.e. case (b), shows a decrease of the electron probe current with increasing gas pressure and the creation of a large presheath around the probe. The simulated electron probe currents are compared with those of measurements by other authors, and the differences are discussed.
机译：

电子和离子电流与圆柱形Langmuir（静电）探针使用粒子内/蒙特卡罗（PIC / MC）自一致计算压力范围内的中性气体模拟2-3,000〜PA。当探头附近的中性气体颗粒的碰撞是重要的，仿真使我们即使在高中性气体压力下也能计算探头电流。本文的主要目的是在这种高气体压力下计算探针电流，并将结果与​​实验测量的探针电流的比较进行比较。用于两种情况的模拟：（a）（a）探针在非热等离子体中具有不同的半径，高电子气体压力为2〜pa（以验证我们的模拟的正确性），和（b）探测器在余辉等离子体中的半径为10？μm，具有低电子温度和较高的中性气体压力（最多3,000〜Pa）。在（a）的情况下获得的电子探针电流与轨道运动有限电流（OMLC）理论预测的那些良好的一致性，所述探针对于给定的等离子体条件，探针高达100Ωμm。在较大的探针半径和/或更高的探针电压下，OM1C理论不正确地预测所研究的等离子体参数的电子探针电流过高。另外，得出了描述碰撞壳体中的预沉淀中的电子密度的空间依赖性的公式。在较高的中性气体压力下的模拟，即案例（b），显示了电子探针电流随着气体压力的增加和探头周围的大预抗冲击的降低。将模拟的电子探针电流与其他作者的测量值进行比较，并讨论了差异。

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