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首页> 外文期刊>Crystal growth & design >Rehabilitation of MgO(001) Substrate Surface for Growth of Single-Crystal LaBaCo2O5+delta Films by Magnetron Sputtering
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Rehabilitation of MgO(001) Substrate Surface for Growth of Single-Crystal LaBaCo2O5+delta Films by Magnetron Sputtering

机译：磁控溅射修复单晶LaBaCo2O5 +δ薄膜的MgO（001）衬底表面修复

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摘要

Single-crystal films are at the foundation of a number of advanced technologies, such as for devices related to microelectronics, optoelectronics, spintronics, and superconducting electronics. In this study, high-temperature annealing was used to rehabilitate the MgO(001) surface to improve the crystallinity of highly epitaxial LaBaCo2O5+delta (LBCO) films, which have demonstrated potential for applications in fast gas sensors. In comparison with the LBCO film grown on the as received substrate, solid evidence is presented to support that the rehabbed substrates facilitate deposition of single-crystal LBCO films by radio frequency magnetron sputtering at the optimized conditions. Thus, substrate annealing is demonstrated to be a practical and effective method for rehabbing the damaged surface of a substrate induced by manufacture and surface milling and is promising for a range of important applications based on the growth of single-crystal films.
机译：单晶膜是许多先进技术的基础，例如与微电子，光电，自旋电子和超导电子相关的设备。在这项研究中，高温退火用于修复MgO（001）表面，以提高高外延LaBaCo2O5 +δ（LBCO）膜的结晶度，这已证明在快速气体传感器中的应用潜力。与在原样衬底上生长的LBCO膜相比，有确凿的证据表明，经过翻新的衬底可以在最佳条件下通过射频磁控溅射促进单晶LBCO膜的沉积。因此，已证明衬底退火是一种用于修复由制造和表面铣削引起的衬底的受损表面的实用且有效的方法，并且对于基于单晶膜生长的一系列重要应用是有希望的。

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