The Effect of Crucible Rotation and Crucible Size in Top‐Seeded Solution Growth of Single‐Crystal Silicon Carbide

Horiuchi Takashi; Wang Lei; Sekimoto Atsushi; Okano Yasunori; Yamamoto Takuya; Ujihara Toru; Dost Sadik

摘要

Abstract > The top‐seeded solution growth method is a promising technique for growing high‐quality silicon carbide single crystal. Some inherent issues in this growth process, such as morphological instability , polycrystalline growth , and low growth rate , should be clarified. A high temperature difference between the seed and the crucible wall in this system is needed to enhance growth. However, such a high temperature gradient makes the radial growth rate profile non‐uniform due to the effect of Marangoni convection below the seed crystal, which leads to poor crystal quality. In the present work, the effects of crucible size and crucible rotation are numerically investigated to minimize the effect of Marangoni convection. The possibilities of the occurrence of growth‐rate non‐uniformity and undesired impurity incorporation are examined. A smaller crucible (in radius) leads to a more uniform growth rate profile. However, it gives rise to a higher possibility of impurity incorporation. It is also predicted that crucible rotation is ineffective in suppressing the Marangoni flow near the seed edge. This leads to a flow stagnation in the center of the melt, and consequently, it does not enhance the carbon transport below the seed. It also does not reduce the possibility of undesired impurity incorporation. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> >顶播液增长方法是一种高质量的碳化碳化物单一的有希望的技术水晶。这种生长过程中的一些固有问题，例如形态不稳定性</ i>，多晶生长</ i>，和低生长速率</ i>，也应阐明。需要在该系统中的种子和坩埚壁之间的高温差异来增强生长。然而，这种高温梯度由于种子晶体下方的Marangoni对流的影响而导致径向生长速率概况不均匀，这导致晶体质量差。在本作工作中，数值研究了坩埚尺寸和坩埚旋转的影响，以最大限度地减少Marangoni对流的影响。检查了生长速率不均匀性和不期望的杂质掺入的可能性。较小的坩埚（in半径）导致更均匀的生长速率曲线。然而，它产生了杂质掺入的可能性。还预测，坩埚旋转在抑制在种子边缘附近的Marangoni流动方面是无效的。这导致熔体中心的流动停滞，因此，它不会增强种子以下的碳转运。它也不会降低不希望的杂质掺入的可能性。 </ p> </ abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-18164/'>《Crystal Research and Technology: Journal of Experimental and Industrial Crystallography》</a> <b style="margin: 0 2px;">|</b><span>2019年第5期</span><b style="margin: 0 2px;">|</b><span>共5页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Horiuchi Takashi&option=202" target="_blank" rel="nofollow">Horiuchi Takashi;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wang Lei&option=202" target="_blank" rel="nofollow">Wang Lei;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Sekimoto Atsushi&option=202" target="_blank" rel="nofollow">Sekimoto Atsushi;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Okano Yasunori&option=202" target="_blank" rel="nofollow">Okano Yasunori;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Yamamoto Takuya&option=202" target="_blank" rel="nofollow">Yamamoto Takuya;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Ujihara Toru&option=202" target="_blank" rel="nofollow">Ujihara Toru;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Dost Sadik&option=202" target="_blank" rel="nofollow">Dost Sadik;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Department of Materials Engineering ScienceOsaka UniversityToyonaka Osaka 560‐8531 Japan;</p> <p>Department of Materials Engineering ScienceOsaka UniversityToyonaka Osaka 560‐8531 Japan;</p> <p>Department of Materials Engineering ScienceOsaka UniversityToyonaka Osaka 560‐8531 Japan;</p> <p>Department of Materials Engineering ScienceOsaka UniversityToyonaka Osaka 560‐8531 Japan;</p> <p>Department of Material Process for Circulatory SocietyTohoku UniversitySendai Miyagi 980‐8579 Japan;</p> <p>Department of Materials ScienceNagoya UniversityChikusa‐ku Nagoya 464‐8603 Japan;</p> <p>Crystal Growth LaboratoryUniversity of VictoriaVictoria BC V8W 3P6 Canada;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/160.html" title="晶体学">晶体学;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=numerical simulation&option=203" rel="nofollow">numerical simulation;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=silicon carbide&option=203" rel="nofollow">silicon carbide;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=top‐seeded solution growth&option=203" rel="nofollow">top‐seeded solution growth;</a> </p> <div class="translation"> 机译：数值模拟;碳化硅;粒子溶液生长; </div> </li> </ul> </div> </div> <div class="literature cardcommon"> <div class="similarity "> <h3 class="all_title" id="enpatent66">相似文献</h3> <div class="similaritytab clearfix"> <ul> <li class="active" >外文文献</li> <li >中文文献</li> <li >专利</li> </ul> </div> <div class="similarity_details"> <ul > <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/journal-foreign-detail/0704022450576.html">The Effect of Crucible Rotation and Crucible Size in Top‐Seeded Solution 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href="/academic-journal-cn_journal-inorganic-materials_thesis/0201248690213.html">大尺寸Y:PbWO4晶体的坩埚下降法生长与光学均匀性研究</a> <b>[J]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=宫波&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 宫波</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=沈定中&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,沈定中</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=任国浩&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,任国浩</a> <span> <a href="/journal-cn-9229/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 无机材料学报 </a> </span> <span> . 2002</span><span>,第002期</span> </span> </div> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/academic-journal-cn_detail_thesis/0201292425880.html">加速坩埚旋转下降技术生长LiInS_2晶体</a> <b>[J]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=王善朋&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 王善朋</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=陶绪堂&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,陶绪堂</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=董春明&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,董春明</a> <span> <a href="/journal-cn-56955/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 人工晶体学报 </a> </span> <span> . 2007</span><span>,第1期</span> </span> </div> </li> <li> <div> <b>6. </b><a class="enjiyixqcontent" href="/academic-conference-cn_meeting-17084_thesis/020221766368.html">瓷坩埚替代铂坩埚在氧化铝灼减分析中的应用</a> <b>[C]</b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=邸伟&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 邸伟</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=李玉静&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,李玉静</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=高峰&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,高峰</a> <span> <a href="/conference-cn-17084/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 2009（重庆）中西部第二届有色金属工业发展论坛 </a> <span> <span> . 2009</span> </span> </div> </li> <li> <div> <b>7. </b><a class="enjiyixqcontent" href="/academic-degree-domestic_mphd_thesis/020313507234.html">300mm直拉单晶硅生长过程中熔体-坩埚边界层的研究</a> <b>[A] </b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=董法运&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 董法运</a> <span> . 2016</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/06120215038271.html">用于连续单晶硅生长的石英坩埚和具有该坩埚的组合坩埚</a> <b>[P]</b> . <span> 中国专利： CN215050850U </span> <span> . 2021-12-07</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/06120112949030.html">用于连续单晶硅生长的石英坩埚及其制造方法和组合坩埚</a> <b>[P]</b> . <span> 中国专利： CN112981519A </span> <span> . 2021-06-18</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130426780428.html">Producing a silicon carbide volume single crystal, comprises producing silicon carbide growth gaseous phase in crystal growth region of growth crucible, and growing the single crystal by deposition from silicon carbide growth gaseous phase</a> <b>[P]</b> . <span> 外国专利：  DE102009016131A1 </span> <span> . 2010-10-07</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：制备碳化硅体积单晶，包括在生长坩埚的晶体生长区域中制备碳化硅生长气相，以及通过从碳化硅生长气相沉积而生长单晶。 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130426780427.html">Producing silicon carbide volume single crystal, by disposing seed crystal in crystal growth region of growth crucible with initial growth surface and center central longitudinal axis and producing growth gas phase in crystal growth region</a> <b>[P]</b> . <span> 外国专利：  DE102009016132A1 </span> <span> . 2010-10-07</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：通过将晶种置于具有初始生长表面和中心中心纵轴的生长坩埚的晶体生长区域中并在晶体生长区域中产生生长气相来生产碳化硅体积单晶 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130421777467.html">Producing silicon carbide volume single crystal, useful for producing semiconductor device, comprises e.g. producing silicon carbide growth gas phase in crystal growth region of crucible, and growing silicon carbide volume single crystal</a> <b>[P]</b> . <span> 外国专利：  DE102010029755A1 </span> <span> . 2011-12-08</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：可用于生产半导体器件的碳化硅体积单晶的生产包括例如在坩埚的晶体生长区域中产生碳化硅生长气相，并生长碳化硅体积单晶 </span> </p> </li> </ul> </div> </div> </div> <div class="theme cardcommon" style="overflow: auto;display:none"> <h3 class="all_title" id="enpatent55">相关主题</h3> <ul id="subject"> </ul> </div> </div> </div> </div> <div class="right rightcon"> <div class="details_img cardcommon clearfix" style="margin-bottom: 10px;display:none;" > </div> </div> </div> <div id="thesis_get_original1" class="downloadBth" style="bottom: 19px;z-index: 999;" onclick="ywcd('0704022450576','4',7,2,1,'',this,24)" class="delivery" prompt="010401" title="通过人工服务将文献原文发送至邮箱" >获取原文</div> <div class="journalsub-pop-up" style="display: 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