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Effect of Crystallization Front Shape on the Dislocation Density in Germanium Single Crystals

机译:结晶前形状对单晶锗脱位密度的影响

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摘要

The effect of crystallization front shape on the dislocation density in Ge single crystals with a diameter of 100 mm, grown by the Czochralski method, has been studied. The dislocation density in crystals with a convex crystallization front is found to be considerably higher. The average dislocation density in experimental ingots with deviation of crystallization front shape from flat in the range from -1.5 to +1.5 mm increases from 75 to 1000 cm(-2) and from 75 to 700 cm(-2) in the cases of convex and concave fronts, respectively. Minimum dislocation densities are observed for a flat or slightly concave front.
机译:已经研究了Czochralski方法生长的直径为100mm直径为100mm的Ge单晶位错密度的效果。 发现具有凸结晶前沿的晶体中的位错密度相当高。 在-1.5至+ 1.5mm的扁平范围内,在-1.5至+ 1.5mm的平面中偏差的实验锭中的平均位错密度从75〜1000cm(-2)增加,在凸起的情况下增加75至700cm(-2) 和凹面的前锋。 对于平坦或略微凹进的前沿观察到最小位错密度。

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