Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem

Astafev S. B.; Yanusova L. G.

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Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem

机译：求解薄膜反射函数逆问题的自相关函数的合成

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A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a superposition of Gaussians, whose parameters are related to the characteristics of the film layers and interfaces. The potential of this method is demonstrated by a number of model examples.

机译：提出了一种方法来估计（使用自相关函数（ACF））确定薄膜的电子密度分布的层的厚度。该方法不需要额外的条件，并且适用于任意反射曲线。它基于高斯叠加的ACF合成，其参数与胶片层和界面的特性有关。通过多种模型示例对该方法的潜力进行了证明。

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《Crystallography reports》 |2019年第1期|共3页
作者
Astafev S. B.; Yanusova L. G.;
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Russian Acad Sci Fed Sci Res Ctr Crystallog &

Photon Shubnikov Inst Crystallog Moscow 119333 Russia;

Russian Acad Sci Fed Sci Res Ctr Crystallog &

Photon Shubnikov Inst Crystallog Moscow 119333 Russia;

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正文语种 eng
中图分类晶体学;
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1. Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem [J] . Astafev S. B., Yanusova L. G. Crystallography reports . 2019,第1期

机译：求解薄膜反射函数逆问题的自相关函数的合成
2. A new approach to the synthesis of functional thin films: Hierarchical synthesis of CaCO_3 thin films and their transformation into patterned metal thin films [J] . Seung Woo Lee, Kyu Bock Lee, Seung Bin Park Micron: The international research and review journal for microscopy . 2009,第7期

机译：功能薄膜合成的新方法：CaCO_3薄膜的分层合成及其向图案化金属薄膜的转化
3. Enhanced sensitivity to dielectric function and thickness of absorbing thin films by combining total internal reflection ellipsometry with standard ellipsometry and reflectometry [J] . Lizana A., Foldyna M., Stchakovsky M., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2013,第10期

机译：通过将全内反射椭圆仪与标准椭圆仪和反射仪结合使用，增强了对介电功能和吸收薄膜厚度的敏感性
4. Autocorrelation function analysis of phase formation in the initial stage of interfacial reactions of multilayered titanium–silicon thin films [C] . T.H. Yang, S.L. Cheng, L.J. Chen International Conference on Metallurgical Coatings and Thin Films . 2006

机译：多层硅薄膜界面反应初期相位形成的自相关函数分析
5. Design, synthesis, and characterization of functional polyelectrolytes: Applications in the contexts of DNA delivery and the fabrication of functional thin films [D] . Sun, Bin 2010

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6. Achieving Color and Function with Structure: Opticaland Catalytic Support Properties of ZrO2 Inverse Opal ThinFilms [O] . Geoffrey I. N. Waterhouse, *, Wan-Ting Chen, 2018

机译：通过结构实现色彩和功能：光学ZrO2反蛋白石薄膜的合成及催化支撑性能电影
7. Achieving Color and Function with Structure: Optical and Catalytic Support Properties of ZrO2 Inverse Opal Thin Films [O] . Geoffrey I. N. Waterhouse, Wan-Ting Chen, Andrew Chan, 2018

机译：实现具有结构的颜色和功能：ZrO2反蛋白石薄膜的光学和催化支持性能

Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem

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