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Modeling of induction heating in oxide Czochralski systems-advantages and problems

机译：氧化物直拉体系中感应加热的建模-优点和问题

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摘要

Two mathematical models of induction heating for oxide Czochralski crystal growth systems are reviewed, and additional results of electromagnetic field and volumetric heat generation have been computed for both models using a finite element method (ENTWIFE package). In the first model, the eddy current in the RF coil (i.e., the self-inductance effect) has been neglected while for the second model, it is taken into account. For the calculations, the electrical current input and total voltage of induction coil are set to be 1000 A and 200 nu, respectively, with a frequency of 10 kHz; the heat generation in all metallic parts, that is, crucible, afterheater, RF coil, and chamber, has been calculated for a real Czochralski setup. It has been found that by including the self-inductance effect in the RF coil the results change dramatically. Also, it was shown that the spatial distribution of the heat generation in the crucible is more realistic in the second model than in the first model. Concerning the distribution of heat generation in all metallic parts (including the RF coil), the results for the first model are not reasonable, but they are acceptable for the second model.
机译：审查了氧化物Czochralski晶体生长系统的感应加热的两个数学模型，并使用有限元方法（ENTWIFE软件包）为这两个模型计算了电磁场和体积热产生的其他结果。在第一个模型中，RF线圈中的涡流（即自感效应）已被忽略，而在第二个模型中，则被考虑了。为了进行计算，将感应线圈的电流输入和总电压分别设为1000 A和200 nu，频率为10 kHz。对于实际的切克劳斯基装置，已经计算出了所有金属零件（即坩埚，后热器，RF线圈和燃烧室）中的热量生成。已经发现，通过在射频线圈中包括自感效应，结果将发生巨大变化。另外，还表明，与第一模型相比，第二模型中坩埚中热量产生的空间分布更为真实。关于所有金属零件（包括RF线圈）中的热量分布，第一个模型的结果不合理，但第二个模型可以接受。

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