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Design and realization of high resolution optical micro-scanning thermal microscope imaging system

机译：高分辨率光学微扫描热显微镜成像系统的设计与实现

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摘要

In order to meet the needs of subtle thermal analysis, We developed a thermal microscope imaging system based on uncooled focal plane detector in 2008. But for more sophisticated observations, the higher spatial resolution of thermal microscope imaging system is needed. Optical micro-scanning technology is one of the effective techniques to solve this problem. It can improve the systems spatial resolution based on existing imaging devices. Early we have developed an optical micro-scanning thermal microscope imaging system. But the system has a large micro-scanning error and requires high accuracy on the mechanical manufacturing and optical processing, which is not conducive to product. In order to reduce the micro-scanning error of developed optical microscanning thermal microscope imaging system and improve the spatial resolution of the system, a high precision micro-scanning component design method was proposed. The working principle of optical flat plate rotation micro-scanning is analyzed. The parameters and processing tolerances of micro-scanner are given. The integrated design and processing are realized with the existing uncooled thermal microscope imaging system. Results of standard oversample reconstruction for the real thermal microscope images have shown that the system is designed successfully and achieves higher resolution. It can be applied to high resolution microthermal analysis.
机译：为了满足微妙的热分析的需要，我们在2008年开发了一种基于未冷却焦平面检测器的热显微镜成像系统。但是对于更复杂的观察，需要较高的热显微镜成像系统的空间分辨率。光学微扫描技术是解决这个问题的有效技术之一。它可以基于现有的成像设备来改进系统空间分辨率。早期我们开发了一种光学微扫描热显微镜成像系统。但系统具有大的微扫描误差，需要对机械制造和光学处理的高精度，这不利于产品。为了减少显影光学微阳镜的微扫描误差，提高了系统的空间分辨率，提出了一种高精度的微扫描部件设计方法。分析了光学平板旋转微扫描的工作原理。给出了微扫描仪的参数和处理公差。通过现有的未冷却热显微镜成像系统实现了集成的设计和处理。实际热显微镜图像标准过采样重建的结果表明，该系统设计成功，实现了更高的分辨率。它可以应用于高分辨率的微常分析。

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