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Fracture criterion of mixed-mode crack propagation along the interface in nanoscale components

机译:沿纳米级组件界面混合模式裂纹传播的裂缝标准

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摘要

To investigate the fracture behavior of mixed-mode interfacial cracking in nanoscale components, three different types of nano-specimens, including the nano-cantilever specimen with a horizontal Cu/SiN interface, the nano-cantilever specimen with a vertical Cu/SiN interface, and the modified double-cantilever-beam (DCB) specimen, are adopted to conduct experiments of crack propagation from a pre-crack tip along the Cu/SiN interface, where the mixed-mode, mode-I dominated and qusai-mode-I interface cracking in nanoscale components are successfully achieved, respectively. Crack propagations from the pre-crack tip along Cu/SiN interface with different mode mixities are in situ TEM observed, and critical load/displacement for the starting of crack propagation are precisely measured. FEM analysis reveals that the interfacial crack propagation is dominated by a nanoscale singular stress field in all specimens, and the mixity of fracture modes varies from 0.27 to 1.28. Critical energy release rates for the starting of crack propagation along the Cu/SiN interface of all specimens are obtained with the compliance method, and the energy release rate linearly increases with the transition of fracture mode from the qusai-mode-I status to the mixed-mode one. Furthermore, the critical normal stress and shear stress show a circular relation, indicating the criterion for evaluating the mixed-mode crack propagation along interface in nanoscale components.
机译:为了研究纳米级部件中混合模式界面裂缝的断裂行为,三种不同类型的纳米样本,包括具有水平Cu / SiN接口的纳米悬臂样品,纳米悬臂标本具有垂直CU / SIN接口,并采用改进的双悬臂 - 梁(DCB)样本来进行沿着Cu / Sin接口的预裂纹尖端的裂纹传播的实验,其中混合模式,模式 - 我主导和QUSai-Mode-i纳米级组分中的界面开裂分别成功实现。沿着与不同模式混合的Cu / Sin接口的预裂纹尖端的裂纹传播处于原位TEM观察,并且精确地测量了用于开始裂缝传播的临界负载/位移。有限元分析表明,界面裂纹繁殖是由所有样本中的纳米级奇异应力场主导,并且裂缝模式的混合从0.27到1.28变化。通过顺应性方法获得沿所有样本的Cu / Sin接口开始沿着所有样本的Cu / Sin接口开始的临界能量释放速率,并且能量释放速率随着骨折模式的转变从QUSAI模式-I状态到混合的情况而线性增加-Mode一个。此外,临界正常应力和剪切应力示出了圆形关系,表明用于评估沿纳米级部件中的界面的混合模式裂纹传播的标准。

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