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Effect of microbeam geometry on the nano-mass sensor performance

机译：Microbeam几何对纳米质谱的影响

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摘要

Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.
机译：MicroBeams在纳米技术，生物技术，微机电系统和光学中具有广泛的应用和致动器。鉴于其千分尺寸，这些光束使子纳米图精度的精确质量传感器。关于质量传感器的一个重要挑战是提高它们的敏感性和准确性。考虑到这种类型的传感器基于由动态模式中的纳米粒子吸收引起的共振频率变化来操作，Microbeam的几何形状被认为是影响其灵敏度的重要参数。本文研究了矩形微观，这是最常用的质量传感器之一。通过在微观上施加内部和外切口选择三个主要模型，并且使用ABAQUS软件进行振动模拟，总共36个质量传感器配置，具有不同的纵横比。仿真结果导致两个选定的矩形微观型号，外切出显示微传感器的灵敏度随着微观刚度的增加而增加。发现三角空心微磁束是选择用作质量传感器的四种型号中的最佳设计。

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