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Electron holographic material analysis at atomic dimensions

机译:原子尺度上的电子全息材料分析

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摘要

In [110]-oriented GaAs, both types of atomic columns can hardly be distinguished by conventional transmission electron microscopy (TEM) because of the small difference of atomic numbers for Ga and As with Z(Ga) = 31 and Z(As) = 33. Quantitative off-axis electron holography allows unambiguously determining the structural polarity of GaAs in [110]-orientation, where, besides lateral resolution, the sensitivity of the phase signal plays the most important role. In order to attribute the phase signal only to the different types of atoms, two holographic experiments were performed using the same wedge-shaped GaAs-crystal, where for the second experiment, the sample was inserted into the holder upside down yielding an inverse structural polarity of GaAs.
机译:在[110]取向的GaAs中,由于Ga和As的原子序数差异很小(Z(Ga)= 31和Z(As)=),传统的透射电子显微镜(TEM)很难区分两种原子列33.定量离轴电子全息术可以明确确定[110]取向的GaAs的结构极性,其中,除横向分辨率外,相位信号的灵敏度起着最重要的作用。为了仅将相位信号归因于不同类型的原子,使用相同的楔形GaAs晶体进行了两次全息实验,其中第二个实验是将样品​​上下颠倒插入到支架中,从而产生相反的结构极性砷化镓。

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