The phase composition and structural features of (45-90)-mu m-thick foils obtained from nanocrystalline beryllium during multistep thermomechanical treatment have been established using electron microscopy, electron diffraction, electron backscattering diffraction, and energy-dispersive analysis. This treatment is shown to lead to the formation of a structure with micrometer- and submicrometer-sized grains. The minimum average size of beryllium grains is 352 nm. The inclusions of beryllium oxide (D'D mu D) of different modifications with tetragonal (sp. gr. P4(2)/mnm) and hexagonal (sp. gr. P6(3)/mmc) lattices are partly ground during deformation to a size smaller than 100 nm and are located along beryllium grain boundaries in their volume, significantly hindering migration during treatment. The revealed structural features of foils with submicrometer-sized crystallites provide the thermal stability of their structural state. Beryllium with this structure is a promising material for X-ray instrument engineering and for the production of ultrathin (less than 10 mu m) vacuum-dense foils with very high physicomechanical characteristics.
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机译：利用电子显微镜，电子衍射，电子背散射衍射和能量色散分析技术，建立了纳米铍在多步热机械处理过程中获得的（45-90）μm厚箔的相组成和结构特征。结果表明，这种处理导致形成具有微米级和亚微米级晶粒的结构。铍晶粒的最小平均尺寸为352 nm。变形为四方晶格（sp。gr。P4（2）/ mnm）和六方晶格（sp。gr。P6（3）/ mmc）的不同修饰的氧化铍（D'D mu D）的一部分在变形为其尺寸小于100 nm，并且沿铍晶粒边界位于其体积中，显着阻碍了处理过程中的迁移。具有亚微米级微晶的箔片所揭示的结构特征为其结构状态提供了热稳定性。具有这种结构的铍是用于X射线仪器工程以及生产具有非常高的物理机械特性的超薄（小于10微米）真空致密箔的有前途的材料。
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