Multilayer diffraction gratings

Kondakov AS; Roshchupkin DV

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Multilayer diffraction gratings

机译：多层衍射光栅

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Multilayer diffraction gratings have been fabricated by different methods and their X-ray optical properties have been studied. Along with the data on the gratings prepared by conventional methods based on etching, the results of studying multilayer diffraction gratings fabricated by the lift-off technique are reported. (C) 2004 MAIK "Nauka/Interperiodica".

机译：已经通过不同的方法制造了多层衍射光栅，并且已经研究了它们的X射线光学性质。连同通过基于蚀刻的常规方法制备的光栅的数据一起，还报道了研究通过剥离技术制备的多层衍射光栅的结果。（C）2004 MAIK“ Nauka / Interperiodica”。

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《Crystallography reports》 |2004年第1期|共8页
作者
Kondakov AS; Roshchupkin DV;
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正文语种 eng
中图分类晶体学;
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PERFORMANCE;

机译：性能;

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Multilayer diffraction gratings

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