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首页> 外文期刊>Nano Energy >MEMS four-terminal variable capacitor for low power capacitive adiabatic logic with high logic state differentiation
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MEMS four-terminal variable capacitor for low power capacitive adiabatic logic with high logic state differentiation

机译：MEMS四端子可变电容器，用于低功率电容绝热逻辑，具有高逻辑状态差异

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摘要

This paper presents a novel four-terminal variable capacitor (FTVC) dedicated to the recent concept of low power capacitive adiabatic logic (CAL). This FTVC is based on silicon nano/micro technologies and is intended to achieve adiabatic logic functions with a better efficiency that by using field effect transistor (FET). The proposed FTVC consists of two capacitors mechanically coupled and electrically isolated, where a comb-drive input capacitor controls a gap-closing capacitor at the output. To fully implement the adiabatic combinational logic, we propose two types of variable capacitors: a positive variable capacitor (PVC) where the output capacitance value increases with the input voltage, and a negative variable capacitance (NVC) where the output capacitance value decreases when the input voltage increases. A compact and accurate electromechanical model has been developed. The electromechanical simulations demonstrate the ability of the proposed FTVC devices for CAL, with improved features such as high logic states differentiation larger than 50% of the full-scale input signal and cascability of both buffers and inverters. Based on the presented analysis, 89% of the total injected energy in the device can be recovered, the remaining energy being dissipated through mechanical damping. During one cycle of operation, a buffer gate of 10 x 2.5 mu m(2) dissipates only 0.9fJ.
机译：本文介绍了专用于最近低功率电容绝热逻辑（CAL）最近概念的新型四端可变电容器（FTVC）。该FTVC基于硅纳米/微型技术，旨在通过使用场效应晶体管（FET）来实现具有更好效率的绝热逻辑功能。所提出的FTVC由两个机械耦合和电隔离的电容器组成，其中梳驱动输入电容器在输出处控制间隙闭合电容器。为了充分实现绝热组合逻辑，我们提出了两种类型的可变电容器：阳性可变电容器（PVC），其中输出电容值随输入电压而增加，并且输出电容值何时减小输出电容值的负变量电容（NVC）。输入电压增加。已经开发了一种紧凑且精确的机电模型。机电模拟展示了所提出的CAL的能力，具有改进的特征，例如高于全尺寸输入信号的50％的高逻辑状态分化，以及缓冲器和逆变器的可均匀性。基于所提出的分析，可以回收装置中的总喷射能量的89％，剩余的能量通过机械阻尼消散。在一个操作循环期间，缓冲门10×2.5μm（2）仅消散0.9fj。

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