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Highly permeable silicon carbide-alumina ultrafiltration membranes for oil-in-water filtration produced with low-pressure chemical vapor deposition

机译:具有低压化学气相沉积的高压化学气体过滤的高渗透性碳化硅 - 氧化铝超滤膜

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Silicon carbide (SiC) ceramic membranes are of particular significance for wastewater treatment due to their mechanical strength, chemical stability, and antifouling ability. Currently, the membranes are prepared by SiC-particle sintering at a high temperature. The production suffers from long production time and high costs. In this paper, we demonstrated a more economical way to produce SiC ultrafiltration membranes based on low-pressure chemical vapor deposition (LPCVD). SiC was deposited in the pores of alumina microfiltration supports using two precursors (SiH2Cl2 and C2H2/H-2) at a relatively low temperature of 750 degrees C. Different deposition times varying from 0 to 150 min were used to tune membrane pore size. The pure water permeance of the membranes only decreased from 350 Lm(-2)h(-1)bar(-1) to 157 Lm(-2)h(-1 )bar(-1) when the deposition time was increased from 0 to 120 min due to the narrowing of membrane pore size from 71 to 47 nm. Increasing the deposition time from 120 to 150 min mainly resulted in the formation of a thin, dense layer on top of the support instead of in the pores. Oil-in-water emulsion filtration experiments illustrated that both the reversible and irreversible fouling of the SiC-deposited UF membrane was considerably lower as compared to the pristine alumina support. The unique feature that pore sizes decrease linearly as a function of SiC deposition time creates opportunities to produce low-fouling SiC membranes with tuned pore sizes on relatively cheap support.
机译:由于其机械强度,化学稳定性和防污能力,碳化硅(SiC)陶瓷膜对废水处理特别重要。目前,膜通过在高温下通过SiC颗粒烧结制备。生产遭受了长期生产时间和高成本。在本文中,我们证明了一种基于低压化学气相沉积(LPCVD)生产SiC超滤膜的更经济的方法。使用两个前体(SiH2Cl2和C 2 H 2 / H-2)在750℃的相对低温下沉积在氧化铝微滤载体的孔中沉积。使用从0至150分钟的不同沉积时间来调节膜孔径。当沉积时间增加时,膜的纯净水渗透仅在350 LM(-2)H(-1)杆(-1)杆(-1)至157升(-2)H(-1)杆(-1)杆(-1)下降由于71至47nm的膜孔径缩小,0至120分钟。将沉积时间从120至150分钟增加,主要导致在支撑件上的薄,致密层的形成而不是孔中。水包油乳液过滤实验说明了与原始氧化铝载体相比,SiC沉积的UF膜的可逆和不可逆的污垢均相当较低。由于SIC沉积时间,孔径尺寸的独特特征是线性降低的,这会产生在相对便宜的支撑件上产生具有调谐孔径的低结垢的SIC膜的机会。

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