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Filtration of aqueous colloidal ceria slurries using fibrous filters - An experimental and simulation study

机译:使用纤维过滤器过滤胶体胶体浆料 - 一种实验和仿真研究

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摘要

A combined experimental and computational study of fibrous filters for removal of large hydrosols, essential to minimize defects during chemical mechanical polishing, was performed. Dilute aqueous suspensions of colloidal ceria particles, of known size distribution, were filtered and the filter efficiencies were measured for different particle sizes and pH, then converted to single fiber efficiencies. The particle size distributions were also measured for the influent and effluent streams.
机译:进行了用于去除大型氢化物的纤维过滤器的组合实验和计算研究,以最小化化学机械抛光期间的缺陷必不可少。 过滤已知尺寸分布的稀释含水悬浮液,已知尺寸分布,并针对不同的颗粒尺寸和pH测量过滤效率,然后转化为单纤维效率。 还测量流出物和流出物流的粒度分布。

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