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Investigation of nanoSQUID designs for practical applications

机译：实际应用纳米模设计的研究

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In the recent past, considerable effort was spent on the development of superconducting quantum interference device ( SQUID) designs for magnetic detection in the micro-and nano-scale. Where these novel nanoSQUIDs were mostly of a simple format, real applications require more elaborate designs including auxiliary components such as coils and transformers. Therefore, we have developed SQUID designs based on a Nb/HfTi/Nb thin-film technology which offers both, nano-patterning and waferscale manufacturing of complex design structures. Employing e-beam lithography and chemical-mechanical polishing process steps, the area of the superconductor-normal conductor-superconductor Josephson junctions of these nanoSQUIDs has been varied between 150 nm. x. 150 nm and 200 nm. x. 200 nm, whereas the thickness of the barrier is about 20 nm. In order to enable real practical applications, nanoSQUID designs with a number of implemented auxiliary components and design features, such as gradiometric feedback loops, gradiometric transformers, and rf filters, have been carefully investigated. This paper combines a summary of recent achievements with a presentation of detailed measurements of the device performance in magnetic fields of up to a few tens of millitesla. This investigation is intended to pave the way for future practical complex nanoSQUID tools.
机译：在最近的过去，在微纳米级中的磁检测的超导量子干扰装置（鱿鱼）设计的发展中花了相当大的努力。在这些新颖的纳米态大多是一种简单的格式的情况下，真正的应用需要更具精细的设计，包括辅助部件，例如线圈和变压器。因此，我们开发了基于NB / HFTI / NB薄膜技术的鱿鱼设计，该技术提供了复杂设计结构的纳米图案化和晶圆制制造。采用电子束光刻和化学机械抛光工艺步骤，这些纳米喹啉的超导体正常导体 - 超导体Josephson结的面积在150nm之间变化。 X。 150 nm和200nm。 X。 200nm，虽然屏障的厚度约为20nm。为了实现真正的实际应用，已经仔细研究了具有许多实施的辅助部件和设计特征的纳秒设计，例如梯度反馈环，梯度变压器和RF过滤器。本文结合了最近成果的概要，介绍了在磁场中的设备性能的详细测量的介绍，可达几十毫克的磁场。这项调查旨在为未来的实际复杂纳米管工具铺平道路。

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