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Deposition-rate dependence of granular size distribution in Cu aggregate on liquid substrate studied by atomic force microscopy

机译:粒度分布在原子力显微镜研究中液体基质上Cu骨料中粒度分布的沉积速率依赖性

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In this article, we report an atomic force microscopy study on the microstructure and the deposition-rate dependence of granular size distribution in copper (Cu) ramified aggregates on a liquid substrate. This study shows that the ramified Cu aggregates are composed of Gaussian size distribution granules, which form immediately after the Cu atoms are deposited. The interesting phenomenon is that the mean diameter Ф_mof the granules exponentially decays and approaches a stable value Ф_c with an increase in the deposition rate f. The granular mean diameter Ф_m slightly changes with the time interval At during which the film is kept in the vacuum chamber, owing to the large diffusion coefficient of the Cu granules on the liquid substrates. The experimental behavior strongly depends on the properties of the liquid substrate.
机译:在本文中,我们报告了原子力显微镜研究关于液体基质上铜(Cu)中粒度分布的微观结构和沉积速率依赖性的研究。 该研究表明,分枝的Cu聚集体由高斯尺寸分布颗粒组成,在沉积Cu原子后立即形成。 有趣的现象是颗粒的平均直径ф_mOf指数衰减并接近稳定值ф_c,随着沉积速率f的增加而增加。 由于液体基板上的Cu颗粒的大扩散系数,颗粒平均直径Ф_m略有变化,在此期间薄膜保持在真空室中的薄膜。 实验行为强烈取决于液体基材的性质。

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