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Optical diagnostics of dusty plasmas during nanoparticle growth

机译：南粒子生长期间尘土飞扬等离子体的光学诊断

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摘要

Carbon-based thin films deposited on surfaces exposed to a typical capacitively-coupled RF plasma are sources of molecular precursors at the origin of nanoparticle growth. This growth leads to drastic changes of the plasma characteristics. Thus, a precise understanding of the dusty plasma structure and dynamics is required to control the plasma evolution and the nanoparticle growth. Optical diagnostics can reveal some particular features occurring in these kinds of plasmas. Highspeed imaging of the plasma glow shows that instabilities induced by nanoparticle growth can be constituted of small brighter plasma regions (plasmoids) that rotate around the electrodes. A single bigger region of enhanced emission is also of particular interest: the void, a main central dust-free region, has very distinct plasma properties than the surrounding dusty region. This particularity is emphasized using optical emission spectroscopy with spatiotemporal resolution. Emission profiles are obtained for the buffer gas and the carbonaceous molecules giving insights on the changes of the electron energy distribution function during dust particle growth. Dense clouds of nanoparticles are shown to be easily formed from two different thin films, one constituted of polymer and the other one created by the plasma decomposition of ethanol.
机译：沉积在暴露于典型的电容偶联的RF等离子体的表面上的碳基薄膜是纳米粒子生长起源的分子前体的源。这种增长导致血浆特征的变化变化。因此，需要精确地理解尘土飞溅的等离子体结构和动力学来控制等离子体的进化和纳米颗粒生长。光学诊断可以揭示在这些等离子体中发生的一些特殊功能。等离子体发光的高速成像表明，纳米颗粒生长诱导的不稳定性可以由围绕电极旋转的小型较亮的等离子体区域（紫离浆）构成。单个更大的增强排放区域也特别感兴趣：空隙，主要的中央无尘区域，具有比周围的尘尘区域具有非常不同的等离子体特性。使用具有时空分辨率的光发射光谱来强调这种特殊性。获得缓冲气体和碳质分子的发射型材，含有对灰尘颗粒生长期间电子能量分布功能的变化见解。显示纳米颗粒的致密云以容易地由两个不同的薄膜形成，由聚合物构成，另一个由乙醇分解产生的另一个。

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