• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Technisches Messen: Sensoren, Gerate, Systeme >Combination of a novel RGB interferometer using double pulse illumination and a Hartmann-Shack wavefront sensor for dynamic areal topography measurement
【24h】

Combination of a novel RGB interferometer using double pulse illumination and a Hartmann-Shack wavefront sensor for dynamic areal topography measurement

机译：一种新的RGB干涉仪使用双脉冲照明和Hartmann-Shack Wavefront传感器进行动态面形状测量

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this contribution we present a measuring system, which combines a phase-measuring interferometer with a Hartmann-Shack wavefront sensor. Both systems use the same optical path and microscope objective but they differ fundamentally in their working principle and their metrological properties. The wavefront sensor detects low spatial frequency components of a three dimensional surface with a small number of sampling points based on a single monochrome camera image. The interferometer requires two RGB images to reconstruct the same surface but it detects high spatial frequency surface components, which allow surface roughness measurements. A specific double pulse illumination in combination with a periodic phase modulation is used to obtain the required interferograms in approx. 50 mu s. The combination of the measurement results from the wavefront sensor and the interferometer enables to renounce the use of error-prone phase unwrapping algorithms, to increase the robustness and possible applications. The use of both sensors also increases the robustness and the flexibility compared to a single measurement system. The short data acquisition time enables measurement of moving objects and the application in industrial environments. Various measurement results demonstrate the potential and the limits of this combination of sensors.
机译：在该贡献中，我们介绍了一种测量系统，其将相位测量干涉仪与Hartmann-Shack波前传感器相结合。两个系统都使用相同的光路和显微镜物镜，但它们在其工作原理及其计量性质中基本上不同。波前传感器通过基于单色摄像机图像的少量采样点检测三维表面的低空间频率分量。干涉仪需要两个RGB图像来重建相同的表面，而是检测到允许表面粗糙度测量的高空间频率表面分量。与周期性相位调制组合的特定双脉冲照射用于获得约定的干涉图。 50亩。来自波前传感器和干涉仪的测量结果的组合使得能够放弃使用易于易置的相位展开算法，以增加鲁棒性和可能的​​应用。与单个测量系统相比，两个传感器的使用还增加了鲁棒性和灵活性。短数据采集时间使得能够测量移动对象和工业环境中的应用。各种测量结果证明了这种传感器组合的潜力和限制。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号