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首页> 外文期刊>Journal of Micromechanics and Microengineering >Rotational UV-lithography using flexible chromium-coated polymer masks for the fabrication of microstructured dental implant surfaces: a proof of concept
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Rotational UV-lithography using flexible chromium-coated polymer masks for the fabrication of microstructured dental implant surfaces: a proof of concept

机译：使用柔性铬涂层聚合物掩模的旋转紫外线 - 用于制造微结构化牙科植入物表面：概念证明

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摘要

The purpose of this work was to demonstrate the technical feasibility for the fabrication of microgrooves or micropits on dental implants or dental implant abutment surfaces using a novel fabrication method derived from common UV-lithographic microfabrication. Instead of using a flat and rigid chromium/glass mask to structure a photoresist layer on a small cylindrical part, a flexible chromium-coated polymer mask was introduced into the lithographic setup. Through an elastic deformation of the polymer mask, it was possible to achieve lateral resolutions as small as 1.5 mu m on small cylinders and to structure conical parts. By subsequent controlled under-etching of the structured photoresist layer, microgrooves of different cross-sectional geometries can be generated and applied to the implant or implant abutment surface. Such structures can be used for contact guidance of human gingival fibroblasts or endothelia cells to enhance the wound healing process and the overall soft-tissue integration.
机译：这项工作的目的是展示使用来自常见的UV光刻微加工的新型制造方法，展示牙科植入物或牙科植入物邻接表面上的微型植物或微型种植体的技术可行性。代替使用扁平和刚性铬/玻璃掩模来构造小圆柱形部分上的光致抗蚀剂层，将柔性铬涂覆的聚合物掩模引入光刻设置。通过聚合物掩模的弹性变形，可以在小汽缸上实现小于1.5μm的横向分辨率和结构锥形部件。通过随后控制结构化光致抗蚀剂层的蚀刻，可以产生不同的横截面几何形状的微型植物和施加到植入物或植入物邻接表面上。这种结构可用于人牙龈成纤维细胞或内皮细胞的接触引导，以增强伤口愈合过程和整体软组织积分。

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