Mode II adhesion energy analysis of stiction-failed poly-Si mu cantilevers using a MEMS load cell

Mousavi Behnam Kheyraddini; Mousavi Arash Kheyraddini; Hieber Tyler Jordan; Chen James; Leseman Zayd Chad

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Mode II adhesion energy analysis of stiction-failed poly-Si mu cantilevers using a MEMS load cell

机译：模式II使用MEMS称重传感器的椎间盘突出的多Si mu悬臂粘附能量分析

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This paper studies the Mode II adhesion energy of a Poly-Si mu cantilever stiction failed on a poly-Si substrate. A custom flexural microelectromechanical systems (MEMS) load cell and an interferometer are used to measure the applied forces and measure the deflections in real time. From this data the Mode II strain energy release rates were determined to range between 0.520-5.10 mJ m(-2).

机译：本文研究了多Siμ悬臂术的模式II粘附能量在多Si衬底上失效。定制弯曲微机电系统（MEMS）称重传感器和干涉仪用于测量所施加的力并实时测量偏转。从该数据，模式II应变能释放速率确定为0.520-5.10mJ m（-2）之间的范围。

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来源
《Journal of Micromechanics and Microengineering》 |2019年第7期|共6页
作者
Mousavi Behnam Kheyraddini; Mousavi Arash Kheyraddini; Hieber Tyler Jordan; Chen James; Leseman Zayd Chad;
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作者单位

Northern New Mexico Coll Dept ElectroMech Engn Espanola NM USA;

New Mexico Inst Min &

Technol Mech Engn Dept Socorro NM 87801 USA;

Kansas State Univ Dept Mech &

Nucl Engn Manhattan KS 66506 USA;

Univ Buffalo Dept Mech &

Aerosp Engn Bufallo NY USA;

Kansas State Univ Dept Mech &

Nucl Engn Manhattan KS 66506 USA;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
MEMS; stiction failure; critical strain energy release rate; adhesion energy; Mode II;

机译：MEMS;沉默失败;临界应变能释放率;粘附能量;模式II;

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1. Mode II adhesion energy analysis of stiction-failed poly-Si mu cantilevers using a MEMS load cell [J] . Mousavi Behnam Kheyraddini, Mousavi Arash Kheyraddini, Hieber Tyler Jordan, Journal of Micromechanics and Microengineering . 2019,第7期

机译：模式II使用MEMS称重传感器的椎间盘突出的多Si mu悬臂粘附能量分析
2. Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting [J] . Kim S.-B., Park H., Kim S.-H., Microelectromechanical Systems, Journal of . 2013,第1期

机译：基于 $ d_ {31} $ 和 $ d_ {33} $ 模式用于振动能量收集
3. An energy based approach for reliability analysis of delamination growth under mode I, mode II and mixed mode I/II loading in composite laminates [J] . Delbariani-Nejad Ali, Farrokhabadi Amin, Jafari Sepideh Rezaei International Journal of Mechanical Sciences . 2018,第期

机译：在复合层压板中的不同模式I，模式II和混合模式I / II负载下分层增长可靠性分析的能量方法
4. A 25 mu m/sup 2/, new poly-Si PMOS load (PPL) SRAM cell having excellent soft error immunity [C] . Yamanaka, T., Hashimoto, . 1988

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6. Comprehensive Analysis of the Energy Harvesting Performance of a Fe-Ga Based Cantilever Harvester in Free Excitation and Base Excitation Mode [O] . Huifang Liu, Chen Cong, Qiang Zhao, 2019

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7. Development of analytical models of T- and U-shaped cantilever-based MEMS devices for sensing and energy harvesting applications [O] . S.M. Heinrich, M.T. Boudjiet, D. Thuau, 2014

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Mode II adhesion energy analysis of stiction-failed poly-Si mu cantilevers using a MEMS load cell

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