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首页> 外文期刊>ACS applied materials & interfaces >Thin Films of Two Functional Oxides Patterned Laterally by Soft Lithography
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Thin Films of Two Functional Oxides Patterned Laterally by Soft Lithography

机译：通过软光刻技术横向构图的两种功能性氧化物薄膜

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摘要

Thin films of two laterally patterned fonctional oxides of uniform thickness were obtained in a two-step soft-lithographic micromolding process. CoFe2O4/ZnO and CoFe2O4/ BaTiO3 dual-phase patterns were fabricated. The films showed good replication of the pattern that was defined in the first patterning step. X-ray diffraction showed that the films consisted of two distinct phases, and magnetic force microscopy showed that the compounds were laterally separated, the separation pattern being the same as that of the initial soft-lithographic process. The films exhibited slight height variations near the edges of the phases, which were introduced in the first deposition step and were not fully compensated in the second deposition step. The films are sufficiently smooth to allow fabrication of multilayer structures.
机译：在两步软光刻微成型过程中，获得厚度均匀的两个横向构图的功能性氧化物的薄膜。制作了CoFe2O4 / ZnO和CoFe2O4 / BaTiO3双相图形。薄膜显示出在第一个构图步骤中定义的图案的良好复制。 X射线衍射表明该膜由两个不同的相组成，磁力显微镜表明这些化合物被横向分离，其分离方式与最初的软光刻工艺相同。膜在相的边缘附近显示出轻微的高度变化，这是在第一沉积步骤中引入的，而在第二沉积步骤中并未得到完全补偿。膜足够光滑以允许制造多层结构。

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