A novel integration technology for gigabit DRAM with 0.115μm design rule

著录项

• 来源
  《電子情報通信学会技術研究報告. 電子デバイス. Electron Devices》 |2000年第147期|共5页
• 作者

  Hyuppil Noh; Sangdon Lee; Woncheol Cho; Jongrim Lee; Gucheol Jeong; Sung-keun Chang; Hyunjo Yang; Dongseok Kim; Junki Kim; Jisoo Park; Junsik Lee; Jinwon Park; Hee-koo Yoon;

  展开▼
• 作者单位

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  Department of Materials Science and Engineering Laboratory for Research on the Structure of Matter University of Pennsylvania Philadelphia Pennsylvania 19104-6272 USA;

  展开▼
• 收录信息
• 原文格式 PDF
• 正文语种 jpn
• 中图分类 一般性问题;
• 关键词

  Si epi plug; Pre poly plug; Contact resistance; Thermal budget;

  机译：SI EPI插头;预热塞;接触电阻;热预算;