...
首页> 外文期刊>Crystal growth & design >Promoting Crystal Distribution Uniformity Based on the CVD Method with the Aid of Finite Element Methods
【24h】

Promoting Crystal Distribution Uniformity Based on the CVD Method with the Aid of Finite Element Methods

机译:借助有限元方法,基于CVD方法促进晶体分布均匀性

获取原文
获取原文并翻译 | 示例
           

摘要

Two-dimensional materials, including transition-metal dichalcogenides (TMDs), have aroused wide interest due to their various applications in gas sensors and photoelectric devices. However, achieving a uniform distribution of materials on the substrate is still a challenging and urgent problem. In this article, the factors influencing the material distribution during the chemical vapor deposition process are investigated by a simulation method, and the results show that the unequal velocity distributions caused by the carrier gas flow on the growing surface play an important role in influencing the crystal distribution. Boundary layer theory is used to explain the mechanism of the effect of the carrier gas flow on the growth uniformity. An improved method is proposed to improve the material uniformity by changing the placement of the Si/SiO2 substrate from face down to face up. The simulation and experimental results show that uniformly distributed MoS2 with a large size and good quality can be obtained with the improved method. This work provides a method for preparing uniformly distributed TMDs on a substrate, which should facilitate subsequent research of two-dimensional materials and promote the application of two-dimensional materials.
机译:由于它们在气体传感器和光电装置中的各种应用,包括过渡金属二甲硅藻(TMDS)的二维材料引起了广泛的兴趣。然而,在衬底上实现均匀的材料分布仍然是一个具有挑战性和紧迫的问题。在本文中,通过模拟方法研究了影响化学气相沉积过程中材料分布的因素,结果表明,由载气流量对生长表面引起的不等速度分布在影响晶体中起着重要作用分配。边界层理论用于解释载气流对生长均匀性的影响的机制。提出了一种改进的方法来通过改变从面朝下的Si / SiO 2基板的放置来改善材料均匀性。模拟和实验结果表明,通过改进的方法可以获得具有大尺寸和良好质量的均匀分布的MOS2。该工作提供了一种制备均匀分布的TMDS在基材上的方法,其应促进后续研究二维材料并促进二维材料的应用。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号