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Flexible Pressure-Sensitive Contact Transistors Operating in the Subthreshold Regime

机译：在亚阈值方案中操作的柔性压敏接触晶体管

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Organic thin-film transistor (TFT)-based pressure sensors have received huge attention for wearable electronic applications such as health monitoring and smart robotics. However, there still remains a challenge to achieve low power consumption and high sensitivity at the same time for the realization of truly wearable sensor systems where minimizing power consumption is significant because of limited battery run time. Here, we introduce a flexible pressure-sensitive contact transistor (PCT), a new type of pressure-sensing device based on organic TFTs for next-generation wearable electronic skin devices. The PCT consists of deformable S/D electrodes integrated on a staggered TFT. The deformable S/D electrodes were fabricated by embedding conducting single-walled carbon nanotubes on the surface of microstructured polydimethylsiloxane. Under pressure loads, the deformation of the electrodes on an organic semiconductor layer leads modulation of drain current from variation in both the channel geometry and contact resistance. By strategic subthreshold operation to minimize power consumption and increase the dominance of contact resistance because of gated Schottky contact, the PCT achieves both ultralow power consumption (order of 10(1) nW) and high sensitivity (18.96 kPa(-1)). Finally, we demonstrate a 5 x 5 active matrix PCT array on a 3 mu m-thick parylene substrate. The device with ultralow power consumption and high sensitivity on a biocompatible flexible substrate makes the PCT promising candidate for next-generation wearable electronic skin devices.
机译：基于有机薄膜晶体管（TFT）的压力传感器对可穿戴电子应用的巨大关注，例如健康监控和智能机器人。然而，在实现真正可穿戴的传感器系统的同时仍然存在挑战，以实现真正可穿戴传感器系统，因为电池运行有限，可以最小化功耗。在这里，我们引入了一种柔性压敏接触晶体管（PCT），基于用于下一代可穿戴电子皮肤装置的有机TFT的新型压力传感装置。 PCT由集成在交错TFT上的可变形的S / D电极组成。通过在微结构化的聚二甲基硅氧烷的表面上嵌入导电单壁碳纳米管来制造可变形的S / D电极。在压力负载下，电极对有机半导体层上的电极的变形引起了沟道几何形状和接触电阻的变化的漏极电流的调制。通过战略亚阈值操作，以最小化功耗并增加接触电阻的主导地位由于门控肖特基接触，PCT均可实现超级功耗（10（1）NW的顺序）和高灵敏度（18.96kPa（-1））。最后，我们在3μm厚的聚对二甲苯基板上展示了5×5有源矩阵PCT阵列。具有超级功耗和生物相容性柔性基板上具有高灵敏度的装置使得PCT对下一代可穿戴电子皮肤装置的候选者进行了通用候选者。

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