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Electrostatic energy profiles at nanometer-scale in group III nitride semiconductors using electron holography

机译:使用电子全息图的III族氮化物半导体的纳米级静电能谱

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摘要

Electron holography in the transmission electron microscope can provide energy band profiles with sub-nanometer spatial resolution. The phase of the electron beam is sensitive to the electrostatic potential, and a direct measurement of the latter can be achieved by making the electron beam signal that traverses the specimen interfere with a reference electron beam that travels through vacuum. This technique has been quite useful in probing the fields and charges at dislocations and at interfaces in semiconductors. This article presents a review of work done with the participation of the author in the past decade in the use of this technique to determine the piezoelectric effects in group III nitride semiconductor heterostructures.
机译:透射电子显微镜中的电子全息术可以提供具有亚纳米级空间分辨率的能带分布。电子束的相位对静电势很敏感,可以通过使穿过样品的电子束信号与通过真空的参考电子束发生干扰来实现对静电势的直接测量。该技术在探测半导体中位错和界面处的场和电荷方面非常有用。本文介绍了作者在过去十年中参与使用此技术确定III族氮化物半导体异质结构中的压电效应的工作。

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