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首页> 外文期刊>Plasma Sources Science & Technology >Inferring plasma parameters from the sheath characteristics of a dc biased hairpin probe
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Inferring plasma parameters from the sheath characteristics of a dc biased hairpin probe

机译：从DC偏置发夹探针的鞘特性推断等离子体参数

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In this paper,the cylindrical sheath around a hairpin resonator probe has been varied by applying a dc potential to the hairpin to infer different plasma parameters in an argon and oxygen discharge.As the sheath width increases due to negative bias,the resonance frequency of the hairpin correspondingly shifts toward a lower value.An analytical model based on fluid approximation has been developed to estimate the sheath width variation as a function of the applied voltage on the probe.The analytical result is then compared with the well-known capacitance model that assumes a conjugate dielectric region around the hairpin consisting of a pair of cylindrical sheaths and the plasma.Using this method,a wide range of plasma parameters,including the electron temperature T_e,plasma potential V_p,and electronegativity parameter α_s,have been obtained in an electronegative oxygen discharge.The advantage of this method over the conventional floating hairpin resonator probe has been qualitatively discussed.
机译：本文通过在发夹式谐振器探针周围施加直流电势来改变圆柱形鞘层，从而推断氩氧放电中的不同等离子体参数。随着鞘层宽度因负偏压而增加，发夹的共振频率相应地向较低的值移动。建立了一个基于流体近似的分析模型，以估算鞘层宽度随探针上施加电压的变化。然后将分析结果与众所周知的电容模型进行比较，该模型假设发夹周围有一个由一对圆柱形护套和等离子体组成的共轭介电区域。利用这种方法，在电负性氧放电中获得了广泛的等离子体参数，包括电子温度T_e、等离子体电位V_p和电负性参数α_s。定性地讨论了这种方法相对于传统浮动发夹式谐振探头的优势。

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