ACTIVE MIRROR FOR FOCUS SHIFTING AND PLANE FIELD CORRECTION IN UKP LASER SYSTEMS

P. Bottner; A. Brady; C. Reinlein; R. Eberhardt; S. Nolte

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ACTIVE MIRROR FOR FOCUS SHIFTING AND PLANE FIELD CORRECTION IN UKP LASER SYSTEMS

机译：用于焦点移位和平面田间校正的活跃镜子在UKP激光系统中

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MOTIVATION: In the field of UKP laser structuring, movable lens systems are often used to shift the focus in the z-direction while F-Theta lenses are used for the plane field correction in the x-y-plane. By using an active mirror, both functionalities can be achieved with a single optical element.

机译：动机：在USP激光构造领域，可移动透镜系统通常用于在z方向上移动焦点，而F-θ透镜用于在x-y平面上进行平面场校正。通过使用主动反射镜，两种功能都可以通过单个光学元件实现。

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《DVS-Berichte》 |2021年第367期|共1页
作者
P. Bottner; A. Brady; C. Reinlein; R. Eberhardt; S. Nolte;
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作者单位

Institute for Applied Optics and Precision Engineering;

Institute for Applied Optics and Precision Engineering;

Institute for Applied Optics and Precision Engineering;

Institute for Applied Optics and Precision Engineering;

Institute for Applied Optics and Precision Engineering;

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正文语种 eng
中图分类焊接、金属切割及金属粘接;
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ACTIVE MIRROR FOR FOCUS SHIFTING AND PLANE FIELD CORRECTION IN UKP LASER SYSTEMS

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