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首页> 外文期刊>Journal of Micromechanics and Microengineering >Design and implementation of dual pressure variation chambers for bone conduction microphone
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Design and implementation of dual pressure variation chambers for bone conduction microphone

机译：骨传导麦克风双压变形室的设计与实现

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摘要

This study presents a bone conduction microphone (BCM) to detect the variation of air pressure resulted from the skull vibration. The presented BCM consists of a commercial MEMS microphone, the sensing circuits, the bulk metal, the deformable polymer diaphragm, and two printed circuit board (PCB) covers. In this design, two chambers and a vibrating spring-mass structure are hermetic sealed by two PCB covers. As the spring-mass structure vibrates, the pressure of one chamber will increase and that of another will decrease. Thus, the vibration could introduce a higher pressure load as well as a larger sensing signal for the BCM. In application, the device with the dimensions of 3.5 x 2.65 x 1.48 mm(3) is implemented. Measurements show the device has a sensitivity of -38.8 dBV, THD < 0.48% at 1 kHz with 1 g excitation, and +/- 5 dB bandwidth for 100 Hz similar to 6.7 kHz. Frequency responses of different samples show good repeatability. Furthermore, air leakage effect and crosstalk of the skull vibration sensing module have also been investigated in this paper. The results demonstrate the feasibility of the presented BCM.
机译：本研究提出了一种骨传导传声器（BCM），用于检测颅骨振动引起的气压变化。该BCM由一个商用MEMS麦克风、传感电路、块体金属、可变形聚合物膜片和两个印刷电路板（PCB）盖组成。在这种设计中，两个腔室和一个振动弹簧质量结构由两个PCB盖密封。当弹簧-质量结构振动时，一个腔室的压力将增加，另一个腔室的压力将降低。因此，振动可能会给车身控制模块带来更高的压力负载和更大的感应信号。在应用中，实现了尺寸为3.5 x 2.65 x 1.48 mm（3）的装置。测量结果表明，该器件在1kHz和1g激励下的灵敏度为-38.8dBV，THD<0.48%，在100Hz下的带宽为+/-5dB，类似于6.7kHz。不同样品的频率响应显示出良好的重复性。此外，本文还研究了颅骨振动传感模块的漏气效应和串扰。结果证明了该方法的可行性。

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