Laser-printed hemispherical silicon Mie resonators

Syubaev Sergey; Mitsai Eugeny; Starikov Sergey; Kuchmizhak Aleksandr

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Laser-printed hemispherical silicon Mie resonators

机译：激光印刷半球形硅MIE谐振器

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Subwavelength nanostructures made of high-index low-loss materials have revolutionized the fields of linear and nonlinear nanophotonics, stimulating growing demands for efficient and inexpensive fabrication technologies. Here, we demonstrate high-precision and reproducible printing of hemispherical Si nanoparticles (NPs) via controllable dewetting of glass-supported a-Si films driven by a single femtosecond laser pulse. The diameter of the formed nanocrystalline NPs can be fully controlled by initial alpha-Si film thickness as well as lateral size of the laser spot and can be predicted by a simple empirical model based on conservation of energy and mass. A resonant optical response associated with Mie-type resonances supported by hemispherical NPs was confirmed by combining numerical modeling with optical microspectroscopy. Inexpensive and high-performing direct laser printing of nanocrystalline Si Mie resonators with a user-defined arrangement opens a pathway for various applications in optical sensing and. nonlinear nanophotonics. (C) 2021 Optical Society of America

机译：由高折射率低损耗材料制成的亚波长纳米结构已经彻底改变了线性和非线性纳米光子学领域，刺激了对高效廉价制造技术的需求。在这里，我们展示了通过单个飞秒激光脉冲驱动的玻璃支撑非晶硅薄膜的可控去湿，高精度且可重复打印半球形硅纳米颗粒（NPs）。形成的纳米晶纳米颗粒的直径可以完全由初始α-Si膜厚度以及激光光斑的横向尺寸控制，并且可以通过基于能量和质量守恒的简单经验模型进行预测。通过将数值模拟与光学显微光谱相结合，证实了半球形NPs支持的Mie型共振相关的共振光学响应。纳米晶Si-Mie谐振器的廉价和高性能直接激光打印（具有用户定义的排列）为光学传感和成像领域的各种应用开辟了道路。非线性纳米光子学。（2021）美国光学学会

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来源
《Optics Letters》 |2021年第10期|共4页
作者
Syubaev Sergey; Mitsai Eugeny; Starikov Sergey; Kuchmizhak Aleksandr;
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作者单位

Inst Automat &

Control Proc FEB RAS 5 Radio Str Vladivostok 690041 Russia;

Inst Automat &

Control Proc FEB RAS 5 Radio Str Vladivostok 690041 Russia;

Ruhr Univ Bochum Univ Str 150 D-44801 Bochum Germany;

Inst Automat &

Control Proc FEB RAS 5 Radio Str Vladivostok 690041 Russia;

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正文语种 eng
中图分类计量学;光学;
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1. Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon [J] . Chen Ming, Li Shuang, Cui Qing-Qiang, 中国物理：英文版 . 2013,第010期
2. Motion equations of hemispherical resonator and analysis of frequency split caused by slight mass non-uniformity [J] . Yan HUO, Shunqing REN, Guoxing YI, 中国航空学报（英文版） . 2020,第010期
3. Working Principle and Error Analysis for Hemispherical Resonator Gyro under Force-rebalance Mode [J] . Hong-Bo Zhao, Shun-Qing Ren 哈尔滨工业大学学报（英文版） . 2013,第001期
4. Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode [J] . Tao Ma, Yong-Sheng Tian, Shao-Hui Liu, 中国物理：英文版 . 2021,第011期
5. Wafer Scale Formation of Monocrystalline Silicon-Based Mie Resonators via Silicon-on-Insulator Dewetting [J] . Abbarchi Marco, Naffouti Meher, Vial Benjamin, ACS nano . 2014,第11期

机译：通过绝缘体上硅的去湿法形成单晶硅基Mie谐振器的晶片级
6. Mie Resonator Color Inks of Monodispersed and Perfectly Spherical Crystalline Silicon Nanoparticles [J] . Sugimoto Hiroshi, Okazaki Takuma, Fujii Minoru Advanced Optical Materials . 2020,第12期

机译：Mie谐振器彩色油墨的单分散和完美的球形晶体纳米粒子
7. Large-Scale and Low-Cost Fabrication of Silicon Mie Resonators [J] . Chaabani Wajdi, Proust Julien, Movsesyan Artur, ACS nano . 2019,第4期

机译：硅片谐振器的大规模和低成本制作
8. Directional excitation of Bloch surface waves by laser-printed Mie nanoparticles [C] . Boris I. Afinogenov, Natalia G. Kokareva, Dmitry N. Gulkin, Conference on Active Photonic Platforms . 2020

机译：激光印刷的MIE纳米粒子的光滑表面波的定向激励
9. Compensation and trimming for silicon micromechanical resonators and resonator arrays for timing and spectral processing. [D] . Samarao, Ashwin K. 2011

机译：硅微机械谐振器和谐振器阵列的补偿和微调，用于定时和频谱处理。
10. Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators [O] . P. Spinelli, M.A. Verschuuren, A. Polman -1

机译：基于亚波长表面米氏谐振器的宽带全向减反射涂层
11. Mie Resonator Color Inks of Monodispersed and Perfectly Spherical Crystalline Silicon Nanoparticles [O] . Hiroshi Sugimoto, Takuma Okazaki, Minoru Fujii 2020

机译：Mie谐振器彩色油墨的单分散和完美的球形晶体纳米粒子
12. Robust Controller Design for Hemispherical Resonator Gyroscope. [R] . Hyun, C., Chang, B. S., Kang, T. 2011

机译：半球谐振陀螺的鲁棒控制器设计。

Laser-printed hemispherical silicon Mie resonators

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