Detection of ion implantation in focused ion beam processing by scattering-type scanning near-field optical microscopy

Zhang Wenhao; Zhang Kaidi; Wang Wenting; Chen Yuhang

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Detection of ion implantation in focused ion beam processing by scattering-type scanning near-field optical microscopy

机译：通过散射型扫描近场光学显微镜检测聚焦离子束处理中的离子注入

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We employed scattering-type scanning near-field optical microscopy (s-SNOM) to explore the implantation of gallium ions in a silicon substrate after focused ion beam (FIB) etching. Different ion doses were applied, and the s-SNOM amplitude image contrast between the processed and unprocessed regions was investigated. The results demonstrate that the contrast decreases along with the increase of the ion dose. A similar dependence of the residual gallli um element concentration on the ion dose is found from the energy dispersive spectroscopy. Such comparisons imply that s-SNOM imaging is sensitive to the implanted ions. The s-SNOM aided analysis of FIB etching can benefit the fabrication optimization, especially when the processed materials' properties are of critical importance. (C) 2021 Optical Society of America

机译：我们利用散射型扫描近场光学显微镜（s-SNOM）研究了聚焦离子束（FIB）刻蚀后镓离子在硅衬底中的注入。应用不同的离子剂量，研究了处理区和未处理区的s-SNOM振幅图像对比度。结果表明，随着离子剂量的增加，对比度降低。从能量色散光谱中发现，残余镓元素浓度与离子剂量有类似的依赖关系。这种比较意味着s-SNOM成像对注入的离子很敏感。s-SNOM辅助分析FIB腐蚀有助于制造优化，尤其是在加工材料的性能至关重要的情况下。（2021）美国光学学会

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来源
《Optics Letters》 |2021年第3期|共4页
作者
Zhang Wenhao; Zhang Kaidi; Wang Wenting; Chen Yuhang;
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作者单位

Univ Sci &

Technol China Dept Precis Machinery &

Precis Instrumentat Hefei 230027 Peoples R China;

Univ Sci &

Technol China Dept Precis Machinery &

Precis Instrumentat Hefei 230027 Peoples R China;

Univ Sci &

Technol China Dept Precis Machinery &

Precis Instrumentat Hefei 230027 Peoples R China;

Univ Sci &

Technol China Dept Precis Machinery &

Precis Instrumentat Hefei 230027 Peoples R China;

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正文语种 eng
中图分类计量学;光学;
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1. Focused ion beam built-up on scanning electron microscopy with increased milling precision [J] . LUO Hu, WANG HaiLong, CUI YiMin, 中国科学:物理学力学天文学（英文版） . 2012,第004期
2. Imaging the interphase of carbon fiber composites using transmission electron microscopy:Preparations by focused ion beam, ion beam etching, and ultramicrotomy [J] . Wu Qing, Li Min, Gu Yizhuo, 中国航空学报（英文版） . 2015,第005期
3. Shear Force Detection Using Single-Tine Oscillating Tuning Fork for Scanning Near-Field Optical Microscopy [J] . 谭晓靖, 孙家林, 刘晟, 中国物理快报：英文版 . 2003,第003期
4. Single Particle-Based Confocal Laser Scanning Microscopy for Visual Detection of Copper Ions in Confined Space [J] . Ke Wang, Manping Qian, Honglan Qi, 中国化学（英文版） . 2021,第007期
5. Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining [J] . C.Lehrer, L.Frey, S.Petersen Microelectronic Engineering . 2001,第期

机译：通过聚焦离子束纳米加工制造用于扫描近场光学显微镜的硅孔径探针
6. Signal detection techniques for scattering-type scanning near-field optical microscopy [J] . Dai Guangbin, Yang Zhongbo, Geng Guoshuai, Applied Spectroscopy Reviews: An International Journal of Principles, Methods, and Applications . 2018,第6a10期

机译：用于散射型扫描近场光学显微镜的信号检测技术
7. Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near-infrared scanning near-field optical microscopy (NIR-SNOM) [J] . Dziomba Th., Ohlsson O., Lehrer Ch., Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 1999,第5期

机译：离子束处理的硅探针在透射和交叉极化反射模式下进行近红外扫描近场光学显微镜（NIR-SNOM）
8. Fabrication of probes for scanning near-field optical microscopy using focused ion beam [C] . A S Kolomiytsev, N A Shandyba, I V Panchenko International Conference on Scanning Probe Microscopy . 2019

机译：用聚焦离子束扫描近场光学显微镜的探头的制造
9. Ballistic electron emission microscopy studies of electron scattering in gold/gallium arsenide Schottky diodes damaged by focused ion beam implantation. [D] . McNabb, John Wesley. 1995

机译：弹道电子发射显微镜研究聚焦离子束注入损坏的金/砷化镓肖特基二极管中电子的散射。
10. Hybrid scanning ion conductance and scanning near-field optical microscopy for the study of living cells. [O] . Y E Korchev, M Raval, M J Lab, 2000

机译：混合扫描离子电导和扫描近场光学显微镜用于活细胞的研究。
11. Nano-slit probes for near-field optical microscopy fabricated by focused ion beams [O] . Danzebrink H.U., Dziomba T., Sulzbach T., 1999

机译：用于近场光学显微镜的纳米狭缝探针，由聚焦离子束制成
12. SCANNING-ELECTRON-MICROSCOPY OBSERVATIONS AND MECHANICAL CHARACTERISTICS OF ION-BEAM-SPUTTERED SURGICAL IMPLANT ALLOYS [R] . Albert J. Weigand, M. Lise Meyer, Jerri S. Ling 1977

机译：离子束溅射外科植入物的扫描电子显微镜观察及力学特性

Detection of ion implantation in focused ion beam processing by scattering-type scanning near-field optical microscopy

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