High-accuracy deflectometric microscope system with a large slope range

Gu Hanting; Wang Daodang; Gu Zhixiong; Kong Ming; Liu Lu; Lei Lihua; Liang Rongguang

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High-accuracy deflectometric microscope system with a large slope range

机译：具有大斜率范围的高精度偏转测定显微镜系统

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摘要

We propose an off-axis deflectometric microscope system for microscopic surface testing with both high measurement accuracy and a large slope dynamic range. A high-luminance liquid crystal display directly illuminates the tested sample with coded fringes, and then the reflected fringes passing through a microscope objective are captured by a pinhole camera, from which the deflectometric microscopic testing with a large slope range can be achieved. The accuracy of the proposed system is validated numerically and experimentally, and a large measurable slope dynamic range is also demonstrated. The proposed system provides a feasible way with the slope range in the order of sub-radians and sag resolution better than 0.05 nm. (C) 2021 Optical Society of America

机译：我们提出了一种用于微观表面检测的离轴偏转显微镜系统，具有高测量精度和大斜率动态范围。高亮度液晶显示器直接用编码条纹照亮被测样品，然后针孔相机捕捉通过显微镜物镜的反射条纹，从而实现大斜率范围的偏转显微镜测试。数值和实验验证了该系统的准确性，并证明了一个大的可测量斜坡动态范围。该系统提供了一种可行的方法，其斜率范围为亚弧度，弧垂分辨率优于0.05nm。（2021）美国光学学会

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来源
《Optics Letters》 |2021年第9期|共4页
作者
Gu Hanting; Wang Daodang; Gu Zhixiong; Kong Ming; Liu Lu; Lei Lihua; Liang Rongguang;
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作者单位

China Jiliang Univ Coll Metrol &

Measurement Engn Hangzhou 310018 Peoples R China;

China Jiliang Univ Coll Metrol &

Measurement Engn Hangzhou 310018 Peoples R China;

China Jiliang Univ Coll Metrol &

Measurement Engn Hangzhou 310018 Peoples R China;

China Jiliang Univ Coll Metrol &

Measurement Engn Hangzhou 310018 Peoples R China;

China Jiliang Univ Coll Metrol &

Measurement Engn Hangzhou 310018 Peoples R China;

Shanghai Inst Measurement &

Testing Technol Shanghai Key Lab Online Test &

Control Technol Shanghai 201203 Peoples R China;

Univ Arizona James C Wyant Coll Opt Sci Tucson AZ 85721 USA;

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正文语种 eng
中图分类计量学;光学;
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High-accuracy deflectometric microscope system with a large slope range

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