High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser

Holder Daniel; Weber Rudolf; Roecker Christoph; Kunz Gerhard; Bruneel David; Delaigue Martin; Graf Thomas; Ahmed Marwan Abdou

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High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser

机译：高质量的高通量硅激光研磨，使用1 kW子皮秒激光

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We report on high-quality high-throughput laser milling of silicon with a sub-ps laser delivering more than 1 kW of average laser power on the workpiece. In order to avoid heat accumulation effects, the processing strategy for high-quality laser milling was adapted to the available average power by using five-pulse bursts, a large beam diameter of 372 mu m to limit the peak fluence per pulse to approximately 0.7 J/cm(2), and a high feed rate of 24 m/s. As a result, smooth surfaces with a low roughness of S-a <= 0.6 mu m were achieved up to the investigated milling depth of 313 mu m while maintaining a high material removal rate of 230 mm(3)/min. (C) 2021 Optical Society of America

机译：我们报道了一种高质量、高通量的硅激光铣削技术，该技术使用亚ps激光器在工件上提供超过1kw的平均激光功率。为了避免热积累效应，高质量激光铣削的加工策略通过使用五个脉冲脉冲群、372μm的大光束直径将每个脉冲的峰值通量限制在约0.7 J/cm（2）和24 m/s的高进给速率来适应可用的平均功率。因此，Sa＜0.6μm的低粗糙度光滑表面达到了313μm的铣削深度，同时保持了高材料去除率为230 mm（3）/min。（c）美国2021光学学会。

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来源
《Optics Letters》 |2021年第2期|共4页
作者
Holder Daniel; Weber Rudolf; Roecker Christoph; Kunz Gerhard; Bruneel David; Delaigue Martin; Graf Thomas; Ahmed Marwan Abdou;
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Univ Stuttgart Inst Strahlwerkzeuge IFSW Pfaffenwaldring 43 D-70569 Stuttgart Germany;

Univ Stuttgart Inst Strahlwerkzeuge IFSW Pfaffenwaldring 43 D-70569 Stuttgart Germany;

Univ Stuttgart Inst Strahlwerkzeuge IFSW Pfaffenwaldring 43 D-70569 Stuttgart Germany;

Robert Bosch GmbH Robert Bosch Campus 1 D-71272 Renningen Germany;

Lasea Rue Chasseurs Ardennais 10 B-4031 Angleur Belgium;

Amplitude Syst 11 Ave Canteranne F-33600 Pessac France;

Univ Stuttgart Inst Strahlwerkzeuge IFSW Pfaffenwaldring 43 D-70569 Stuttgart Germany;

Univ Stuttgart Inst Strahlwerkzeuge IFSW Pfaffenwaldring 43 D-70569 Stuttgart Germany;

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正文语种 eng
中图分类计量学;光学;
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7. High-quality beam generation in a 8-kW cw CO2 laser [J] . Afonin YV, Golyshev AP, Ivanchenko AI, Quantum electronics . 2004,第4期

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机译：使用高平均功率Nd：玻璃激光系统进行金属的高通量激光喷丸。

High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser

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