Development of micromachining technology in ion microbeam system at TIARA, JAEA.

Kamiya T; Nishikawa H; Satoh T; Haga J; Oikawa M; Ishii Y; Ohkubo T; Uchiya N; Furuta Y

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Development of micromachining technology in ion microbeam system at TIARA, JAEA.

机译：JAEA TIARA的离子微束系统微加工技术的开发。

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An ion-beam-lithography technique has been progressed in the microbeam systems at Japan Atomic Energy Agency (JAEA) Takasaki. In order to obtain a high-precision measure for microbeam size estimation with a high precision, we applied this technique combined with the electroplating process to make a Ni relief pattern as a resolution standard used in secondary electron imaging. As a result, the smallest beam size could be recorded. The scattering of ions in the materials influenced the spatial resolution and this is also discussed.

机译：日本原子能机构（JAEA）高崎的微束系统中已经开发了一种离子束光刻技术。为了获得高精度的微束尺寸估算方法，我们将该技术与电镀工艺相结合，将镍浮雕图案作为二次电子成像中使用的分辨率标准。结果，可以记录最小的光束尺寸。材料中离子的散射影响了空间分辨率，对此也进行了讨论。

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《Applied radiation and isotopes: including data, instrumentation and methods for use in agriculture, industry and medicine》 |2009年第3期|共4页
作者
Kamiya T; Nishikawa H; Satoh T; Haga J; Oikawa M; Ishii Y; Ohkubo T; Uchiya N; Furuta Y;
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正文语种 eng
中图分类原子核物理学、高能物理学;放射医学;
关键词
Ions; SIZES; Micron; Human Development; estimation; 离子; 人类发展;

机译：Ions;SIZES;Micron;Human Development;estimation;离子;人类发展;

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1. Development of micromachining technology in ion microbeam system at TIARA, JAEA. [J] . Kamiya T, Nishikawa H, Satoh T, Applied radiation and isotopes: including data, instrumentation and methods for use in agriculture, industry and medicine . 2009,第3期

机译：JAEA TIARA的离子微束系统微加工技术的开发。
2. Microbeam complex at TIARA: Technologies to meet a wide range of applications [J] . T. Kamiya, K. Takano, T. Satoh, Nuclear Instruments & Methods in Physics Research . 2011,第20期

机译：TIARA的微束复合体：可满足广泛应用的技术
3. Channeling-based collimators for generation of microbeams produced by silicon micromachining technology [J] . Guidi V, Antonini A, Milan E, Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2006,第1期

机译：基于通道的准直仪，用于通过硅微加工技术产生微束
4. Development of Cyclotron Beam Technology for Applications in Materials Science and Biotechnology at JAERI-TIARA [C] . Y. Ohara, K. Arakawa, M. Fukuda, Application of Accelerators in Research and Industry . 2003

机译：回旋加速器束技术的发展，用于JAERI-TIARA的材料科学和生物技术
5. Development of an integrated optical coherent detection system using silicon micromachining technology [D] . Pu, Chuan 2000

机译：利用硅微加工技术开发集成光学相干检测系统
6. A first generation compact microbeam radiation therapy system based on carbon nanotube X-ray technology [O] . M. Hadsell, J. Zhang, P. Laganis, -1

机译：基于碳纳米管X射线技术的第一代紧凑型微束放射治疗系统
7. Development of micromachined field ionization tips for use as an integrated gas detector in a micromachined gas chromatography system [O] . Ghodsian Bahram 1997

机译：开发微机械场电离尖端，用作微机械气相色谱系统中的集成气体检测器
8. Multi-Level Micromachined Systems-on-a-Chip: Technology and Applications [R] . Allen, J. J. , Krygowski, T. W. , Miller, S. L. , 1998

机译：多级微机械系统芯片：技术和应用

Development of micromachining technology in ion microbeam system at TIARA, JAEA.

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