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Two-color thermal detector with thermal chopping for infrared focal-plane arrays

机译:具有热斩波功能的双色热探测器,用于红外焦平面阵列

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Micromachined thermal infrared (IR) detectors are emerging into the marketplace to provide high-performance thermal (IR) imagery at low cost. Thermal detectors can be improved when a tunable wavelength response is provided and when a thermal chopper is incorporated into the detector by use of microelectromechanical (MEM) elements. Most thermal detectors require a chopper. continuous synchronous chopping in the case of pyroelectric detectors, or asynchronous chopping in the case of staring microbolometers. Mechanical choppers are bulky and costly. We present the fundamental principles of micromachined thermal detectors that possess tunable wavelength or color response and a technique for thermal chopping. A micromirror, switching between two spatial positions under the detector, provides a response to two wavelength windows by tuning the optical resonant cavity. The image can then be integrated at the readout level to achieve a multicolor IR picture. A thermal MEM chopper can be used instead of a mechanical chopper to maintain the same video frame rate and to allow for an interlaced resetting of staring thermal arrays. Unlike the second generation of uncooled IR arrays, the actual temperature of objects can be obtained by a comparison of the response in two wavelength windows, in addition to the direct measurement of IR power that they radiate in the entire 8-14-μm spectral region.
机译:微机械热红外(IR)检测器正在进入市场,以低成本提供高性能热(IR)图像。当提供可调的波长响应并且通过使用微机电(MEM)元件将热斩波器并入检测器时,可以改善热检测器。大多数热探测器都需要斩波器。对于热电探测器,是连续同步斩波;对于凝视型测辐射热计,则是异步斩波。机械斩波器体积庞大且昂贵。我们介绍了具有可调波长或颜色响应的微机械热探测器的基本原理以及热斩波技术。在检测器下方两个空间位置之间切换的微镜通过调谐光学谐振腔提供对两个波长窗口的响应。然后可以在读出级别对图像进行积分,以获得多色IR图像。可以使用热MEM斩波器代替机械斩波器,以保持相同的视频帧速率,并允许隔行复位凝视的热阵列。与第二代非冷却红外阵列不同,除了可以直接测量物体在整个8-14-μm光谱范围内辐射的红外功率之外,还可以通过比较两个波长窗口中的响应来获得物体的实际温度。 。

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