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Stabilized phase-shifting fringe analysis by use of current-induced frequency modulation of laser diodes

机译：通过使用电流感应的激光二极管频率调制来稳定相移条纹分析

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摘要

A closed-loop phase-shifting Fizeau-type interferometer was constructed that uses direct frequency modulation of a laser diode. The interferometer is servo controlled entirely in the phase domain, where optical phases are detected by two-frequency optical heterodyning. A detailed study of stabilization of the interferometer under feedback control was conducted both experimentally and theoretically. The interferometer showed good stability against vibration up to 200 Hz. The stabilization factors obtained experimentally are in good agreement with the theoretical calculations. The phase-shifting experiment was accomplished with high precision as well as with high stability against external disturbances. The profile measurement of a mirror surface was made with a phase-shifting analysis algorithm, and good measurement reproducibility of λ/60 in the root-mean-square value was obtained for ten measurements within a period of 20 min.
机译：构造了使用激光二极管的直接频率调制的闭环相移菲索型干涉仪。干涉仪完全在相位域中进行伺服控制，在该相位域中，通过两频光学外差检测光学相位。在实验和理论上都对干涉仪在反馈控制下的稳定性进行了详细研究。干涉仪在高达200 Hz的振动下显示出良好的稳定性。实验获得的稳定因子与理论计算吻合良好。移相实验的完成精度很高，并且对外部干扰具有很高的稳定性。使用相移分析算法对镜面进行轮廓测量，在20分钟内进行十次测量，均方根值的λ/ 60具有良好的测量重现性。

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