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首页> 外文期刊>Applied optics >Effect of surface roughness and subsurface damage on grazing-incidence x-ray scattering and specular reflectance
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Effect of surface roughness and subsurface damage on grazing-incidence x-ray scattering and specular reflectance

机译：表面粗糙度和亚表面损伤对掠入射X射线散射和镜面反射率的影响

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Grazing-incidence specular reflectance and near-specular scattering were measured at AI-K, (1.486-keV, 8.34-Angstrom) radiation an uncoated dielectric substrates whose surface topography had been measured with a scanning probe microscope and a mechanical profiler. Grazing-incidence specular reflectance was also measured on selected substrates at the Cu-K-alpha (8.047-keV, 1.54-Angstrom) wavelength. Substrates included superpolished and conventionally polished fused silica; SiO2 wafers; superpolished and precision-ground Zerodur; conventionally polished, float-polished, and precision-ground BK-7 glass; and superpolished and precision-ground silicon carbide. Roughnesses derived from x-ray specular reflectance and scattering measurements mere in good agreement with topographic roughness values measured with a scanning probe microscope (atomic force microscope) and a mechanical profiler that included similar ranges of surface spatial wavelengths. The specular reflectance was also found to be sensitive to the density of polished surface layers and subsurface damage down to the penetration depth of the x rays. Density gradients and subsurface damage were found in the superpolished fused-silica and precision-ground Zerodur samples. These results suggest that one can nondestructively evaluate subsurface damage in transparent materials using grazing-incidence x-ray specular reflectance in the 1.5-8-keV range. (C) 1998 Optical Society of America. [References: 27]
机译：在AI-K（1.486-keV，8.34埃）辐射下，通过扫描探针显微镜和机械轮廓仪测量其表面形貌的未镀膜介电基材，测量掠入射的镜面反射率和近镜面散射。还以Cu-K-alpha（8.047-keV，1.54埃）波长在选定的基板上测量了掠入射镜面反射率。基材包括超抛光和常规抛光的熔融石英; SiO2晶片抛光和精密研磨的Zerodur;常规抛光，浮抛和精密研磨的BK-7玻璃;以及经过抛光和精磨的碳化硅。从X射线镜面反射和散射测量得出的粗糙度与用扫描探针显微镜（原子力显微镜）和机械轮廓仪测得的表面粗糙度值（包括相似范围的表面空间波长）非常吻合。还发现镜面反射率对抛光的表面层的密度和直至x射线穿透深度的亚表面损伤敏感。在超抛光熔融石英和精密研磨的Zerodur样品中发现了密度梯度和地下破坏。这些结果表明，可以使用1.5-8keV范围内的掠入射X射线镜面反射率来对透明材料中的亚表面损伤进行非破坏性评估。 （C）1998年美国眼镜学会。 [参考：27]

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