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首页> 外文期刊>Applied optics >Laser microprobe and resonant laser ablation for depth profile measurements of hydrogen isotope atoms contained in graphite
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Laser microprobe and resonant laser ablation for depth profile measurements of hydrogen isotope atoms contained in graphite

机译：激光微探针和共振激光烧蚀，用于测量石墨中所含氢同位素原子的深度剖面

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摘要

We measured the depth profile of hydrogen atoms in graphite by laser microprobing combined with resonant laser ablation. Deuterium-implanted graphite was employed for the measurements. The sample was ablated by a tunable laser with a wavelength corresponding to the resonant wavelength of 1S-2S of deuterium with two-photon excitation. The ablated deuterium was ionized by a 2+1 resonant ionization process. The ions were analyzed by a time-of-flight mass spectrometer. The deuterium ions were detected clearly with the resonant ablation. The detection limit was estimated to be less than 10~(16) atoms/cm~(3) in our experiments. We determined the depth profile by considering the etching profile and the etching rate. The depth profile agreed well with Monte Carlo simulations to within a precision of 23 μm for the center position and 4-μm precision for distributions for three different implantation depths.
机译：我们通过激光微探测结合共振激光烧蚀测量了石墨中氢原子的深度分布。使用氘注入的石墨进行测量。用可调谐激光器烧蚀样品，该激光器的波长对应于双光子激发的氘的1S-2S共振波长。烧蚀的氘通过2 + 1共振电离过程电离。通过飞行时间质谱仪分析离子。通过共振消融可以清楚地检测到氘离子。在我们的实验中，检测极限估计小于10〜（16）原子/ cm〜（3）。我们通过考虑蚀刻轮廓和蚀刻速率来确定深度轮廓。深度分布与蒙特卡洛模拟非常吻合，中心位置的精度在23μm以内，三种不同植入深度的分布的精度在4μm以内。

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