DEVELOPED PROFILE OF HOLOGRAPHICALLY EXPOSED PHOTORESIST GRATINGS

Mello BD.; Lima CRA.; Cescato L.; Dacosta IF.

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DEVELOPED PROFILE OF HOLOGRAPHICALLY EXPOSED PHOTORESIST GRATINGS

机译：全息曝光的光致抗蚀剂光栅的发展概况

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A simulation of the profile of holographically recorded structures in photoresists is performed. In addition to its simplicity this simulation can he used to take into account the effects that arise from exposure, photosensitization, development, and resolution of positive photoresists. We analyzed the effects of isotropy of wet development, nonlinearity of the photoresist response curve, background light, and standing waves produced by reflection at the film-substrate interface by using this simulation, and the results agree with the experimentally recorded profiles. [References: 24]

机译：对光致抗蚀剂中的全息记录结构的轮廓进行模拟。除了简单之外，该模拟还可以用来考虑由正性光刻胶的曝光，光敏性，显影和分辨率引起的影响。通过使用该模拟，我们分析了湿显影的各向同性，光致抗蚀剂响应曲线的非线性，背景光以及在膜-基底界面处反射产生的驻波的影响，结果与实验记录的轮廓吻合。 [参考：24]

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《Applied optics》 |1995年第4期|共7页
作者
Mello BD.; Lima CRA.; Cescato L.; Dacosta IF.;
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正文语种 eng
中图分类光学;
关键词
Holographic gratings; Photoresist processing; Relief gratings;

机译：全息光栅;光刻胶加工;浮雕光栅;

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专利

1. DEVELOPED PROFILE OF HOLOGRAPHICALLY EXPOSED PHOTORESIST GRATINGS [J] . Mello BD., Lima CRA., Cescato L., Applied optics . 1995,第4期

机译：全息曝光的光致抗蚀剂光栅的发展概况
2. Low-stray-light concave holographic gratings processed by combining the methods of photoresist hot-melting and oxygen-ion ashing [J] . Applied optics . 2020,第13期

机译：通过将光致抗蚀剂热熔和氧离子灰化的方法组合来处理低杂散光凹面的全息光栅
3. DYNAMIC HOLOGRAPHIC GRATINGS WITH PHOTORESIST [J] . Olivaresperez A., Juarezperez JL., Santoyo FM., Applied optics . 1995,第25期

机译：带有光刻胶的动态全息网片
4. Simulation and optimization of holographically exposed photoresist gratings [C] . Ch. Zanke, Andreas Gombert, Andreas Erdmann, International conference on optical and optoelectronics . 1999

机译：仿真和优化全面暴露的光致抗蚀剂光栅
5. PERIODIC INTEGRATED OPTICAL STRUCTURES IN PHOTORESIST: APPLICATION TO GRATING COUPLERS. [D] . AUSTIN, STEWART SIEGMUND. 1976

机译：光刻胶中的周期性集成光学结构：在光栅耦合器中的应用。
6. Transcriptomic and phenotypic profiling in developing zebrafish exposed to thyroid hormone receptor agonists [O] . Derik E. Haggard, Pamela D. Noyes, Katrina M. Waters, -1

机译：暴露于甲状腺激素受体激动剂的发育中斑马鱼的转录组和表型分析
7. Depth attenuated refractive index profiles in holographic gratings recorded in photopolymer materials [O] . Gallego Rico, Sergi, Ortuño Sánchez, Manuel, Neipp López, Cristian, 2004

机译：光敏聚合物材料中记录的全息光栅中的深度衰减折射率分布
8. Use of real time latent images to write long holographic diffraction gratings in photoresist [R] . Bruce R. Napier, Nicholas J. Phillips 1997

机译：使用实时潜像在光刻胶中写入长全息衍射光栅

DEVELOPED PROFILE OF HOLOGRAPHICALLY EXPOSED PHOTORESIST GRATINGS

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