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Spectroscopic generalized ellipsometry based on Fourier analysis

机译：基于傅立叶分析的光谱椭圆仪

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摘要

The extension of a spectroscopic ellipsometer that consists of a fixed polarizer, a rotating polarizer, a sample, and a fixed analyzer (PRPSE) to generalized ellipsometry to determining the generalized ellip-sometric angles and the optical functions of an anisotropic medium is reported. The PRPSE configuration eliminates the polarization sensitivity of the light source. A general numerical technique has been derived to characterize the optical properties of the anisotropic material without intermediate generalized ellipsometric angles. The proposed method is experimentally verified for uniaxial mercuric iodide. The ordinary and the extraordinary refractive and absorption indices, respectively, N_(o) = n_(o) ik_(o) and N_(e) = n_(e) －ik_(e), can be extracted directly from the Fourier coefficients measured by the PRPSE on a HgI_(2) crystal face that contains the optical axis. The orientations of the optical axis with respect to the plane of incidence were also determined by direct analysis of the measured Fourier coefficients. Measurements were made of reflection across a spectral range of 1.5-4.13 eV at one angle of incidence (Φ = 70°) for several azimuths φ of the optical axis with respect to the plane of incidence. The generalized ellipsometric angles were obtained from numerical inversion by changes of both polarizer and analyzer azimuth angles P and A.
机译：报道了将由固定偏光镜，旋转偏光镜，样品和固定分析仪（PRPSE）组成的光谱椭偏仪扩展到广义椭偏仪，以确定广义椭偏角和各向异性介质的光学功能的方法。 PRPSE配置消除了光源的偏振敏感性。已经推导了一种通用的数值技术来表征各向异性材料的光学特性，而无需中间广义的椭偏角。实验证明该方法可用于单轴碘化汞。 N_（o）= n_（o）ik_（o）和N_（e）= n_（e）－ik_（e）的寻常折射率和非寻常折射率分别可以直接从测量的傅立叶系数中提取通过PRPSE在包含光轴的HgI_（2）晶面上进行。通过直接分析测得的傅里叶系数也可以确定光轴相对于入射平面的方向。在一个入射角（Φ= 70°）上，以1.5-4.13 eV的光谱范围内的反射率对光轴相对于入射平面的几个方位角φ进行了测量。通过偏振器和检偏器方位角P和A的变化从数值反演获得广义椭圆偏光角。

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