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首页> 外文期刊>Applied optics >Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma
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Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma

机译：基于气体放电等离子体的高度重复的极紫外辐射源

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摘要

An extreme-ultraviolet (EUV) radiation source near the 13-nm wavelength generated in a small (1.1 J) pinch plasma is presented. The ignition of the plasma occurs in a pseudosparklike electrode geometry, which allows for omitting a switch between the storage capacity and the electrode system and for low inductive coupling of the electrically stored energy to the plasma. Thus energies of only a few joules are suffiCient to create current pulses in the range of several kiloamperes, which lead to a compression and a heating of the plasmas to electron densities of more than 10~(17) cm~(-3) and temperatures of several tens of electron volts, which is necessary for emission in the EUV range. As an example, the emission spectrum of an oxygen plasma in the 11-18-nm range is presented. Transitions of beryllium-and lithium-like oxygen ions can be identified. Current waveform and time-resolved measurements of thc EUV emission are discussed. In initial experiments a repetitive operation at nearly 0.2 kHz could be demonstrated. Additionally, the broadband emission of a xenon plasma generated in a 2.2-J discharge is presented.
机译：提出了在小（1.1 J）收缩等离子体中产生的13 nm波长附近的极紫外（EUV）辐射源。等离子体的点火以伪火花状的电极几何形状发生，这允许省略存储容量和电极系统之间的切换，并允许电存储的能量与等离子体的低感应耦合。因此仅几焦耳的能量就足以产生几千安培范围内的电流脉冲，从而导致等离子体压缩并加热到电子密度超过10〜（17）cm〜（-3）和温度几十个电子伏特，这对于在EUV范围内发射是必需的。例如，给出了11-18 nm范围内的氧等离子体的发射光谱。可以确定铍和锂样氧离子的跃迁。讨论了EUV发射的电流波形和时间分辨测量。在最初的实验中，可以证明在约0.2 kHz的频率下重复运行。另外，提出了在2.2-J放电中产生的氙等离子体的宽带发射。

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