Vibration-resistant direct-phase-detecting optical interferometers

Carlson TB; Denzer SM; Greenlee TR; Groschen RP; Peterson RW; Robinson GM; 3M CO 3M CTR ST PAUL MN 55144.; BETHEL COLL DEPT PHYS ST PAUL MN 55112.

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Vibration-resistant direct-phase-detecting optical interferometers

机译：耐振动直接相位检测光学干涉仪

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Two dual-beam differential direct-phase-detecting optical interferometers for scanning moving surfaces are described. Two beams from these interferometers are focused similar to 42 mu m apart on moving surfaces, and the difference in their reflected path lengths is measured to provide the surface roughness measurement. These interferometers are exceptionally insensitive to environmental vibrations and to surface physical and chemical factors. Applications discussed include the measurement of the surface roughness of a rotating cylinder and a moving web. (C) 1997 Optical Society of America.

机译：描述了用于扫描运动表面的两个双光束差分直接相位检测光学干涉仪。来自这些干涉仪的两束光束以大约42μm的间隔聚焦在移动的表面上，并测量其反射路径长度的差异以提供表面粗糙度的测量值。这些干涉仪对环境振动以及表面物理和化学因素异常敏感。讨论的应用包括旋转圆柱体和运动幅材表面粗糙度的测量。（C）1997年美国眼镜学会。

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《Applied optics》 |1997年第28期|共10页
作者
Carlson TB; Denzer SM; Greenlee TR; Groschen RP; Peterson RW; Robinson GM; 3M CO 3M CTR ST PAUL MN 55144.; BETHEL COLL DEPT PHYS ST PAUL MN 55112.;
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正文语种 eng
中图分类光学;
关键词
optical interferometry; interferometry; interferometer; profilometry; laser; scanning; on-line; online; metrology; dual-beam; optics; inspection; process; moving surface; moving web; differential; acousto-optic modulator; photodetector; frequency-shift; polarization; Wollaston prism; THEORETICAL-ANALYSIS; DISPERSION QUALITY; SURFACE; FILMS;

机译：光学干涉测量法;干涉测量法;干涉仪;轮廓测量法;激光;扫描;在线;在线;计量学;双光束;光学;检查;过程;移动的表面;移动的纤网;差分;声光调制器;光电探测器;频移;偏振;沃拉斯顿棱镜;理论分析;色散质量;表面;薄膜;

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专利

1. Vibration-resistant direct-phase-detecting optical interferometers [J] . Carlson TB, Denzer SM, Greenlee TR, Applied optics . 1997,第28期

机译：耐振动直接相位检测光学干涉仪
2. Vibration -resistant direct-phase-detecting optical interferometers [J] . Timothy B. Carlson, Steven M. Denzer, Thomas R. Greenlee Applied optics . 1997,第26a28期

机译：耐振动的直接检测光学干涉仪
3. Dual-channel interferometer for vibration-resistant optical measurement [J] . Duan Mingliang, Zong Yi, Xu Yixuan, Optics and Lasers in Engineering . 2020,第Apra期

机译：双通道干涉仪，用于抗振动光学测量
4. Vibration-resistant interferometric measurement of optical surface figure and roughness [C] . Qian Liu, Wen Huang, Lulu Li, Asia Pacific Conference on Optics Manufacture;Society of Photo-Optical Instrumentation Engineers;Moore Nanotechnology Systems LLC . 2020

机译：光学表面图形和粗糙度的抗振动干涉测量
5. All-optical regeneration of high bit rate lightwave systems using an all-active semiconductor optical amplifier Mach-Zehnder interferometer. [D] . Monfils, Iannick. 2002

机译：使用全有源半导体光放大器Mach-Zehnder干涉仪对高比特率光波系统进行全光再生。
6. Double common-path interferometer for flexible optical probe of optical coherence tomography [O] . Jae Seok Park, Zhongping Chen, Myung Yung Jeong, -1

机译：双相干干涉仪用于光学相干断层扫描的柔性光学探头
7. Erfassung von Formabweichungen rotierender optischer Flächen mit linien-scannendem Interferometer, Echtzeitauswertung und Achsabweichungskompensation / Detection of form deviations of rotating optical surfaces with line-scanning interferometer, real-time evaluation and compensation of scan axis deviations [O] . Jörg Riebeling, Igor Wellem, Peter Lehmann, 2019

机译：记录带有线扫描干涉仪的旋转光学表面的形状偏差，实时评估和轴偏差补偿/检测旋转光学表面与线扫描干涉仪，实时评估和扫描轴偏差补偿的形状偏差

Vibration-resistant direct-phase-detecting optical interferometers

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