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Detection of defects in multiple-layer structures by using surface plasmon resonance

机译:利用表面等离子体共振检测多层结构中的缺陷

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摘要

A method for diagnosis., a silver-dielectric interface is proposed. This method relies on surface plasmon resonance at the Ag-dielectric interface. It yields a good estimate of an air gap between a thin Ag film and a polymer (dielectric). Detection of an air gap thickness of approximately half of the incident probing beam wavelength was monitored. Probing a small air gap is also discussed in the case of poor adhesion at the Ag-polymer interface. # 1997 Optical Society of America
机译:提出了一种用于诊断银介电界面的方法。该方法依赖于Ag-电介质界面处的表面等离子体共振。它可以很好地估算出薄的Ag膜和聚合物(电介质)之间的气隙。监测大约是入射探测光束波长一半的气隙厚度的检测。在Ag-聚合物界面处的粘合性较差的情况下,还探讨了探测小气隙的问题。 #1997美国眼镜学会

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