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Influence of incoherent: Superposition of light on ellipsometric coefficients

机译：非相干的影响：光的叠加对椭偏系数的影响

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摘要

Reflections from the back surface of a transparent substrate influence the evaluation of optical constants of thin films from ellipsometric measurements. If the thickness of the substrate is large compared with the coherence length of the Light, the relative phase between the p and s mode, which commonly is measured by ellipsometry, cannot be defined properly. We show how the reflections from the back surface of the substrate are taken into account in ellipsometric measurements by calculating the intensities of reflections for arbitrary angles of polarization. Applications of the new method, such as transmittance ellipsometry, ellipsometry at the back surface of the substrate, and the determination of the optical constants at the substrate-layer interface, are compared with measurements. (C) 1997 Optical Society of America
机译：透明基板背面的反射会影响椭圆偏振法测量薄膜的光学常数。如果基板的厚度比光的相干长度大，则通常无法通过椭圆光度法测量的p和s模式之间的相对相位无法正确定义。我们展示了如何通过计算任意偏振角的反射强度，在椭圆偏振测量中考虑到来自基板背面的反射。将这种新方法的应用与测量结果进行了比较，例如透射率椭圆仪，衬底背面的椭圆仪以及确定衬底层界面处的光学常数。 （C）1997年美国眼镜学会

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