Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model

Kildemo M; Bulkin P; Drevillon B; Hunderi O

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Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model

机译：使用非相干反射模型通过多波长椭圆偏振法实时控制玻璃上等离子体沉积的多层

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Real-time control by multiwavelength phase-modulated ellipsometry (PME) of the growth of multilayer structures deposited on transparent glass is presented. The structures consist of plasma-deposited SiO2 and SiNx stacks. A model that takes into account incoherent reflection in the substrate is described and tested. A generalized feedback control method that incorporates the incoherent modeling of the transparent substrate is further applied to the growth of a Fabry-Perot and a standard quarter-wave filter, The resulting optical coatings characterized by spectroscopic PME and transmission measurements show a reproducible precision, with less than 1% error between target and measured spectral responses. (C) 1997 Optical Society of America.

机译：提出了通过多波长相位调制椭圆偏振法（PME）实时控制沉积在透明玻璃上的多层结构的生长。该结构由等离子体沉积的SiO2和SiNx叠层组成。描述并测试了考虑基材中非相干反射的模型。结合了透明基材非相干模型的通用反馈控制方法，进一步应用于法布里-珀罗（Fabry-Perot）和标准四分之一波长滤光片的生长。以光谱PME和透射测量为特征的所得光学涂层具有可再现的精度，具有目标和测量光谱响应之间的误差小于1％。（C）1997年美国眼镜学会。

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《Applied optics》 |1997年第25期|共8页
作者
Kildemo M; Bulkin P; Drevillon B; Hunderi O;
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正文语种 eng
中图分类光学;
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real-time control; ellipsometry; optical coatings; incoherent reflection; TRANSPARENT THIN-FILMS; SPECTROSCOPIC ELLIPSOMETRY; OPTICAL FUNCTIONS; GROWTH; SEMICONDUCTORS;

机译：实时控制;椭圆光度法;光学涂层;非相干反射;透明薄膜;分光光度法;光学功能;生长;半导电;

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1. Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model [J] . Kildemo M, Bulkin P, Drevillon B, Applied optics . 1997,第25期

机译：使用非相干反射模型通过多波长椭圆偏振法实时控制玻璃上等离子体沉积的多层
2. Real-time monitoring and growth control of Si-gradient-index structures by multiwavelength ellipsometry [J] . M. Kildemo Applied optics . 1998,第1a4期

机译：多波长椭偏仪对硅梯度结构的实时监测和生长控制
3. Real-time control of the deposition of optical coatings by multiwavelength ellipsometry [J] . Kildemo M., Drevillon B. Surface & Coatings Technology . 1998,第1a3期

机译：通过多波长椭圆偏振法实时控制光学涂层的沉积
4. Real-time monitoring by multiwavelength ellipsometry of the growth of silicon alloy multilayers and gradient index structures [C] . M.Kildemo, Ecole Polytechnique, Norwegian Univ. of Science an d Technology, Developments in Optical Component Coatings . 1996

机译：通过多波长椭圆偏振法实时监测硅合金多层膜和梯度指数结构的生长
5. Real-time in situ ellipsometry for the controlled deposition of anti-reflection coatings on semiconductor laser facets. [D] . Wu, I-Fan. 1993

机译：实时原位椭偏仪可控制减反射膜在半导体激光面上的沉积。
6. Investigating organic multilayers by spectroscopic ellipsometry: specific and non-specific interactions of polyhistidine with NTA self-assembled monolayers [O] . Ilaria Solano, Pietro Parisse, Ornella Cavalleri, 2016

机译：通过光谱椭偏法研究有机多层：聚组氨酸与NTA自组装单层的特异性和非特异性相互作用
7. Real-time nonlinear model predictive control of a glass forming process using a finite element model [O] . Petereit, Janko, Bernard, Thomas 2013

机译：使用有限元模型的玻璃成形过程的实时非线性模型预测控制
8. Real-Time, Self-Directed MBE Flux Control Incorporating in Situ Ellipsometry.Phase 2 [R] . Palaith, D. 1995

机译：实时，自定向mBE磁通控制结合原位椭圆测量法。第2阶段

Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model

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